| Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro-and nanostructures F Marty, L Rousseau, B Saadany, B Mercier, O Français, Y Mita, ... Microelectronics journal 36 (7), 673-677, 2005 | 391 | 2005 |
| Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon B Saadany, M Malak, M Kubota, F Marty, Y Mita, D Khalil, T Bourouina IEEE journal of selected topics in quantum electronics 12 (6), 1480-1488, 2006 | 90 | 2006 |
| Silicon micromirrors with three-dimensional curvature enabling lensless efficient coupling of free-space light YM Sabry, B Saadany, D Khalil, T Bourouina Light: Science & Applications 2 (8), e94-e94, 2013 | 63 | 2013 |
| MEMS tunable Michelson interferometer with robust beam splitting architecture B Saadany, H Omran, M Medhat, F Marty, D Khalil, T Bourouina 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, 49-50, 2009 | 50 | 2009 |
| A MEMS-based VOA with very low PDL A Bashir, P Katila, N Ogier, B Saadany, DA Khalil IEEE Photonics technology letters 16 (4), 1047-1049, 2004 | 48 | 2004 |
| Fully integrated Mach-Zhender MEMS interferometer with two complementary outputs H Omran, M Medhat, B Mortada, B Saadany, D Khalil IEEE Journal of Quantum Electronics 48 (2), 244-251, 2011 | 47 | 2011 |
| Integrated wide-angle scanner based on translating a curved mirror of acylindrical shape YM Sabry, D Khalil, B Saadany, T Bourouina Optics express 21 (12), 13906-13916, 2013 | 45 | 2013 |
| Characterization of MEMS FTIR spectrometer D Khalil, Y Sabry, H Omran, M Medhat, A Hafez, B Saadany Moems and Miniaturized Systems X 7930, 142-151, 2011 | 44 | 2011 |
| Ultra-compact MEMS FTIR spectrometer YM Sabry, K Hassan, M Anwar, MH Alharon, M Medhat, GA Adib, ... Next-Generation Spectroscopic Technologies X 10210, 63-70, 2017 | 43 | 2017 |
| System, method and apparatus for a micromachined interferometer using optical splitting BA Saadany, DA Khalil, TEE Bourouina US Patent 7,796,267, 2010 | 35 | 2010 |
| Integrated spectral unit YM Sabry, DAM Khalil, M Medhat, H Haddara, B Saadany, K Hassan US Patent 10,060,791, 2018 | 30 | 2018 |
| Wideband optical MEMS interferometer enabled by multimode interference waveguides B Mortada, M Erfan, M Medhat, YM Sabry, B Saadany, D Khalil Journal of Lightwave Technology 34 (9), 2145-2151, 2016 | 30 | 2016 |
| High-throughput deeply-etched scanning Michelson interferometer on-chip B Mortada, YM Sabry, M Nagi, K Hassan, B Saadany, T Bourouina, ... 2014 International Conference on Optical MEMS and Nanophotonics, 161-162, 2014 | 30 | 2014 |
| Long range travel MEMS actuator M Medhat, Y Nada, B Mortada, BA Saadany US Patent 8,497,619, 2013 | 30 | 2013 |
| In-plane external fiber Fabry–Perot cavity comprising silicon micromachined concave mirror YM Sabry, D Khalil, B Saadany, T Bourouina Journal of Micro/Nanolithography, MEMS, and MOEMS 13 (1), 011110-011110, 2014 | 29 | 2014 |
| Spatial splitting-based optical MEMS interferometers B Mortada, DAM Khalil, BA Saadany US Patent 8,922,787, 2014 | 27 | 2014 |
| Fourier transform micro spectrometer based on spatially-shifted interferogram bursts YM Sabry, DAM Khalil, BA Saadany US Patent 9,429,474, 2016 | 26 | 2016 |
| Curved silicon micromirror for linear displacement-to-angle conversion with uniform spot size YM Sabry, D Khalil, B Saadany, T Bourouina IEEE Journal of Selected Topics in Quantum Electronics 21 (4), 165-173, 2014 | 26 | 2014 |
| Contour lithography methods for DRIE fabrication of nanometre–millimetre-scale coexisting microsystems Y Mita, M Kubota, T Harada, F Marty, B Saadany, T Bourouina, T Shibata Journal of Micromechanics and Microengineering 16 (6), S135, 2006 | 26 | 2006 |
| Mechanical displacement multiplier: 250 μm stable travel range MEMS actuator using frictionless simple compliant structures Y Nada, M Medhat, M Nagi, F Marty, B Saadany, T Bourouina 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems …, 2012 | 23 | 2012 |
Diaa KhalilAin Shams University - Si-Ware SystemsEmail verificata su eng.asu.edu.eg
