Design and verification of a structure for isolating packaging stress in SOI MEMS devices Y Hao, W Yuan, J Xie, Q Shen, H Chang
IEEE Sensors Journal 17 (5), 1246-1254, 2016
60 2016 On-chip multiplexed single-cell patterning and controllable intracellular delivery Z Dong, Y Jiao, B Xie, Y Hao, P Wang, Y Liu, J Shi, C Chitrakar, S Black, ...
Microsystems & Nanoengineering 6 (1), 2, 2020
44 2020 Influences of the feedthrough capacitance on the frequency synchronization of the weakly coupled resonators H Zhang, W Yuan, Y Hao, H Chang
IEEE Sensors Journal 15 (11), 6081-6088, 2015
44 2015 A novel resonant accelerometer based on mode localization of weakly coupled resonators HM Zhang, WZ Yuan, BY Li, YC Hao, M Kraft, HL Chang
2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015
42 2015 Single living cell analysis nanoplatform for high-throughput interrogation of gene mutation and cellular behavior Z Dong, S Yan, B Liu, Y Hao, L Lin, T Chang, H Sun, Y Wang, H Li, H Wu, ...
Nano Letters 21 (11), 4878-4886, 2021
36 2021 Bias contribution modeling for a symmetrical micromachined Coriolis vibratory gyroscope Q Shen, H Li, Y Hao, W Yuan, H Chang
IEEE Sensors journal 16 (3), 723-733, 2015
32 2015 Micromechanical mode-localized electric current sensor H Li, Z Zhang, L Zu, Y Hao, H Chang
Microsystems & Nanoengineering 8 (1), 42, 2022
26 2022 A mode-localized resonant accelerometer with self-temperature drift suppression H Kang, B Ruan, Y Hao, H Chang
IEEE Sensors Journal 20 (20), 12154-12165, 2020
23 2020 Mode-localized accelerometer with ultrahigh sensitivity H Kang, B Ruan, Y Hao, H Chang
SCIENCE CHINA Information Sciences, 2020
23 2020 Dicing‐free SOI process based on wet release technology Y Hao, J Xie, W Yuan, H Chang
Micro & Nano Letters 11 (11), 775-778, 2016
23 2016 Design of a capacitive MEMS accelerometer with softened beams C Wang, Y Hao, Z Sun, L Zu, W Yuan, H Chang
Micromachines 13 (3), 459, 2022
17 2022 A microgripper with a post-assembly self-locking mechanism G Yuan, W Yuan, Y Hao, X Li, H Chang
Sensors 15 (8), 20140-20151, 2015
17 2015 A dicing-free SOI process for MEMS devices based on the lag effect J Xie, Y Hao, Q Shen, H Chang, W Yuan
Journal of Micromechanics and Microengineering 23 (12), 125033, 2013
17 2013 Ice shear fracture on nanowires with different wetting states Y He, C Jiang, S Wang, Y Hao, J Xie, X Cao, W Tian, W Yuan
ACS Applied Materials & Interfaces 6 (20), 18063-18071, 2014
16 2014 Rotatory microgripper based on a linear electrostatic driving scheme Y Hao, C Wang, Z Sun, W Yuan, H Chang
Microelectronic Engineering 248, 111601, 2021
15 2021 A micromechanical mode-localized voltmeter Y Hao, J Liang, H Kang, W Yuan, H Chang
IEEE Sensors Journal 21 (4), 4325-4332, 2020
15 2020 A microgripper with a ratchet self-locking mechanism YC Hao, WZ Yuan, HM Zhang, HL Chang
2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015
15 2015 A Micromachined Electrometer With Room Temperature Resolution of 0.256 e/ H Kang, B Ruan, Y Hao, H Chang
IEEE Sensors Journal 20 (1), 95-101, 2019
14 2019 A micro resonant DC electric field sensor based on mode localization phenomenon Z Yan, J Liang, Y Hao, H Chang
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems …, 2019
14 2019 A mode-localized Lorentz force magnetometer with 1.6 μT/√ Hz resolution Z Yan, Y Hao, W Li, Z Zhang, H Chang
2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019
13 2019 
Honglong ChangProfessor of Mechanical Engineering, Northwestern Polytechnical UniversityEmail verificata su nwpu.edu.cn
