| Alumina etch masks for fabrication of high-aspect-ratio silicon micropillars and nanopillars MD Henry, S Walavalkar, A Homyk, A Scherer Nanotechnology 20 (25), 255305, 2009 | 201 | 2009 |
| Phase-exchange-driven wake-up and fatigue in ferroelectric hafnium zirconium oxide films SS Fields, SW Smith, PJ Ryan, ST Jaszewski, IA Brummel, A Salanova, ... ACS applied materials & interfaces 12 (23), 26577-26585, 2020 | 140 | 2020 |
| Tunable visible and near-IR emission from sub-10 nm etched single-crystal Si nanopillars SS Walavalkar, CE Hofmann, AP Homyk, MD Henry, HA Atwater, ... Nano letters 10 (11), 4423-4428, 2010 | 117 | 2010 |
| Pyroelectric response in crystalline hafnium zirconium oxide (Hf1-xZrxO2) thin films JFI S. W. Smith, A. R. Kitahara, M. A. Rodriguez, M. D. Henry, M. T. Brumbach Applied Physics Letters 110 (072901), 2017 | 111 | 2017 |
| ICP etching of silicon for micro and nanoscale devices MD Henry California Institute of Technology, 2010 | 84 | 2010 |
| Ga+ beam lithography for nanoscale silicon reactive ion etching MD Henry, MJ Shearn, B Chhim, A Scherer Nanotechnology 21 (24), 245303, 2010 | 81 | 2010 |
| Advanced plasma processing: etching, deposition, and wafer bonding techniques for semiconductor applications M Shearn, X Sun, MD Henry, A Yariv, A Scherer Semiconductor technologies 27, 81-105, 2010 | 74 | 2010 |
| Al0. 68Sc0. 32N Lamb wave resonators with electromechanical coupling coefficients near 10.28% G Esteves, TR Young, Z Tang, S Yen, TM Bauer, MD Henry, RH Olsson Applied Physics Letters 118 (17), 2021 | 64 | 2021 |
| Methods for fabrication of high aspect ratio micropillars and nanopillars MD Henry, AP Homyk, A Scherer, S Walavalkar US Patent 8,148,264, 2012 | 61 | 2012 |
| Origin of ferroelectric phase stabilization via the clamping effect in ferroelectric hafnium zirconium oxide thin films SS Fields, T Cai, ST Jaszewski, A Salanova, T Mimura, HH Heinrich, ... Advanced Electronic Materials 8 (12), 2200601, 2022 | 53 | 2022 |
| Techniques of cryogenic reactive ion etching in silicon for fabrication of sensors MD Henry, C Welch, A Scherer Journal of Vacuum Science & Technology A 27 (5), 1211-1216, 2009 | 48 | 2009 |
| Radial pn junction, wire array solar cells BM Kayes, MA Filler, MD Henry, JR Maiolo Iii, MD Kelzenberg, ... 2008 33rd IEEE Photovoltaic Specialists Conference, 1-5, 2008 | 41 | 2008 |
| Surface encapsulation for low-loss silicon photonics M Borselli, TJ Johnson, CP Michael, MD Henry, O Painter Applied Physics Letters 91 (13), 131117-131117-3, 2007 | 39 | 2007 |
| Size tunable visible and near-infrared photoluminescence from vertically etched silicon quantum dots SS Walavalkar, AP Homyk, CE Hofmann, MD Henry, C Shin, HA Atwater, ... Applied Physics Letters 98 (15), 2011 | 37 | 2011 |
| Compositional and phase dependence of elastic modulus of crystalline and amorphous Hf1-xZrxO2 thin films SS Fields, DH Olson, ST Jaszewski, CM Fancher, SW Smith, DA Dickie, ... Applied Physics Letters 118 (10), 2021 | 35 | 2021 |
| Wake-up and fatigue mechanisms in ferroelectric Hf0. 5Zr0. 5O2 films with symmetric RuO2 electrodes SS Fields, SW Smith, ST Jaszewski, T Mimura, DA Dickie, G Esteves, ... Journal of Applied Physics 130 (13), 2021 | 33 | 2021 |
| Reactive sputter deposition of piezoelectric Sc0. 12Al0. 88N for contour mode resonators MD Henry, TR Young, EA Douglas, BA Griffin Journal of Vacuum Science & Technology B 36 (3), 2018 | 33 | 2018 |
| Controllable deformation of silicon nanowires with strain up to 24% SS Walavalkar, AP Homyk, MD Henry, A Scherer Journal of Applied Physics 107 (12), 2010 | 32 | 2010 |
| Thermal resistance and heat capacity in hafnium zirconium oxide (Hf1–xZrxO2) dielectrics and ferroelectric thin films EA Scott, SW Smith, MD Henry, CM Rost, A Giri, JT Gaskins, SS Fields, ... Applied Physics Letters 113 (19), 2018 | 31 | 2018 |
| Metal Nitride Electrode Stress and Chemistry Effects on Phase and Polarization Response in Ferroelectric Hf0.5Zr0.5O2 Thin Films SS Fields, SW Smith, CM Fancher, MD Henry, SL Wolfley, MG Sales, ... Advanced Materials Interfaces 8 (10), 2100018, 2021 | 30 | 2021 |
Jon IhlefeldUniversity of VirginiaEmail verificata su virginia.edu
