Seventy-fold enhancement of light extraction from a defectless photonic crystal made on silicon-on-insulator M Zelsmann, E Picard, T Charvolin, E Hadji, M Heitzmann, B Dal’Zotto, ... Applied physics letters 83 (13), 2542-2544, 2003 | 142 | 2003 |
Fabrication of High‐Density, Large‐Area Conducting‐Polymer Nanostructures B Dong, N Lu, M Zelsmann, N Kehagias, H Fuchs, CM Sotomayor Torres, ... Advanced Functional Materials 16 (15), 1937-1942, 2006 | 90 | 2006 |
Reverse-contact UV nanoimprint lithography for multilayered structure fabrication N Kehagias, V Reboud, G Chansin, M Zelsmann, C Jeppesen, C Schuster, ... Nanotechnology 18 (17), 175303, 2007 | 62 | 2007 |
Improved release strategy for UV nanoimprint lithography S Garidel, M Zelsmann, N Chaix, P Voisin, J Boussey, A Beaurain, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2007 | 61 | 2007 |
Two-dimensional polymer photonic crystal band-edge lasers fabricated by nanoimprint lithography V Reboud, P Lovera, N Kehagias, M Zelsmann, C Schuster, F Reuther, ... Applied Physics Letters 91 (15), 2007 | 52 | 2007 |
Surface-directed dewetting of a block copolymer for fabricating highly uniform nanostructured microdroplets and concentric nanorings RA Farrell, N Kehagias, MT Shaw, V Reboud, M Zelsmann, JD Holmes, ... ACS nano 5 (2), 1073-1085, 2011 | 49 | 2011 |
XPS study of the degradation mechanism of fluorinated anti-sticking treatments used in UV nanoimprint lithography D Truffier-Boutry, A Beaurain, R Galand, B Pelissier, J Boussey, ... Microelectronic engineering 87 (2), 122-124, 2010 | 48 | 2010 |
Chemical degradation of fluorinated antisticking treatments in UV nanoimprint lithography D Truffier-Boutry, M Zelsmann, J De Girolamo, J Boussey, C Lombard, ... Applied Physics Letters 94 (4), 2009 | 40 | 2009 |
Pulsed transfer etching of PS–PDMS block copolymers self-assembled in 193 nm lithography stacks C Girardot, S Böhme, S Archambault, M Salaün, E Latu-Romain, ... ACS applied materials & interfaces 6 (18), 16276-16282, 2014 | 36 | 2014 |
Fabrication of highly ordered sub-20 nm silicon nanopillars by block copolymer lithography combined with resist design M Salaun, M Zelsmann, S Archambault, D Borah, N Kehagias, C Simao, ... Journal of Materials Chemistry C 1 (22), 3544-3550, 2013 | 33 | 2013 |
Mold cleaning and fluorinated anti-sticking treatments in nanoimprint lithography D Truffier-Boutry, R Galand, A Beaurain, A Francone, B Pelissier, ... Microelectronic engineering 86 (4-6), 669-672, 2009 | 33 | 2009 |
Spontaneous emission control of colloidal nanocrystals using nanoimprinted photonic crystals V Reboud, N Kehagias, S Torres, M Zelsmann, M Striccoli, ML Curri, ... Applied physics letters 90 (1), 2007 | 32 | 2007 |
Ultrafast Assembly of PS‐PDMS Block Copolymers on 300 mm Wafers by Blending with Plasticizers J Arias‐Zapata, S Böhme, J Garnier, C Girardot, A Legrain, M Zelsmann Advanced Functional Materials 26 (31), 5690-5700, 2016 | 31 | 2016 |
Degradation and surfactant-aided regeneration of fluorinated anti-sticking mold treatments in UV nanoimprint lithography M Zelsmann, C Alleaume, D Truffier-Boutry, A Francone, A Beaurain, ... Microelectronic engineering 87 (5-8), 1029-1032, 2010 | 30 | 2010 |
Photoluminescence enhancement in nanoimprinted photonic crystals and coupled surface plasmons V Reboud, N Kehagias, M Zelsmann, C Schuster, M Fink, F Reuther, ... Optics Express 15 (12), 7190-7195, 2007 | 30 | 2007 |
Characterisation of ultraviolet nanoimprint dedicated resists P Voisin, M Zelsmann, R Cluzel, E Pargon, C Gourgon, J Boussey Microelectronic engineering 84 (5-8), 967-972, 2007 | 30 | 2007 |
High-resolution fused silica mold fabrication for UV-nanoimprint P Voisin, M Zelsmann, C Gourgon, J Boussey Microelectronic engineering 84 (5-8), 916-920, 2007 | 30 | 2007 |
Submicron three-dimensional structures fabricated by reverse contact UV nanoimprint lithography N Kehagias, V Reboud, G Chansin, M Zelsmann, C Jeppesen, F Reuther, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2006 | 30 | 2006 |
One-year stability of glucose dehydrogenase confined in a 3D carbon nanotube electrode with coated poly-methylene green: Application as bioanode for a glucose biofuel cell AB Tahar, A Szymczyk, S Tingry, P Vadgama, M Zelsmanne, S Tsujumura, ... Journal of Electroanalytical Chemistry 847, 113069, 2019 | 28 | 2019 |
Broadband optical characterization and modeling of photonic crystal waveguides for silicon optical interconnects M Zelsmann, E Picard, T Charvolin, E Hadji, M Heitzmann, B Dal’zotto, ... Journal of applied physics 95 (3), 1606-1608, 2004 | 28 | 2004 |