Oxide and metal removal X Wang, J Liu, A Wang, NK Ingle, JW Anthis, B Schmiege US Patent 9,309,598, 2016 | 521 | 2016 |
Even tungsten etch for high aspect ratio trenches X Wang, J Liu, A Wang, NK Ingle US Patent 9,190,293, 2015 | 255 | 2015 |
Tungsten oxide processing J Liu, X Wang, S Park, M Korolik, A Wang, NK Ingle US Patent 8,951,429, 2015 | 210 | 2015 |
Tungsten separation X Wang, J Liu, A Wang, NK Ingle US Patent 9,553,102, 2017 | 199 | 2017 |
Etch suppression with germanium M Korolik, NK Ingle, J Zhang, A Wang, J Liu US Patent 9,576,809, 2017 | 193 | 2017 |
Biological templated synthesis of water-soluble conductive polymeric nanowires Z Niu, J Liu, LA Lee, MA Bruckman, D Zhao, G Koley, Q Wang Nano Letters 7 (12), 3729-3733, 2007 | 192 | 2007 |
Selective titanium nitride etching J Liu, J Zhang, A Wang, NK Ingle, S Park, C Zhijun, CM Hsu US Patent 8,921,234, 2014 | 188 | 2014 |
Gas-phase tungsten etch S Park, X Wang, J Liu, A Wang, SJ Kim US Patent 9,299,575, 2016 | 167 | 2016 |
Chlorine-based hardmask removal X Wang, M Pandit, Z Cui, M Korolik, A Wang, NK Ingle, J Liu US Patent 9,478,434, 2016 | 152 | 2016 |
Selective titanium nitride etching J Liu, J Zhang, A Wang, NK Ingle, S Park, C Zhijun, CM Hsu US Patent 9,449,845, 2016 | 141 | 2016 |
Vertical gate separation J Liu, VR Purayath, X Wang, A Wang, NK Ingle US Patent 9,449,846, 2016 | 134 | 2016 |
Oxide and metal removal X Wang, J Liu, A Wang, NK Ingle, JW Anthis, B Schmiege US Patent 10,465,294, 2019 | 131 | 2019 |
High aspect ratio 3-d flash memory device J Liu, X Wang, A Wang, NK Ingle US Patent App. 15/393,105, 2017 | 123 | 2017 |
Cleaning high aspect ratio vias J Liu, S Park, A Wang, Z Cui, NK Ingle US Patent 9,576,788, 2017 | 119 | 2017 |
Tobacco mosaic virus based thin film sensor for detection of volatile organic compounds MA Bruckman, J Liu, G Koley, Y Li, B Benicewicz, Z Niu, Q Wang Journal of Materials Chemistry 20 (27), 5715-5719, 2010 | 60 | 2010 |
B/SiOx nanonecklace reinforced nanocomposites by unique mechanical interlocking mechanism X Tao, J Liu, G Koley, X Li Advanced Materials 20 (21), 4091-4096, 2008 | 50 | 2008 |
Miniaturized implantable pressure and oxygen sensors based on polydimethylsiloxane thin films G Koley, J Liu, MW Nomani, M Yim, X Wen, TY Hsia Materials Science and Engineering: C 29 (3), 685-690, 2009 | 45 | 2009 |
Investigation of CdZnTe crystal defects using scanning probe microscopy G Koley, J Liu, KC Mandal Applied Physics Letters 90 (10), 2007 | 41 | 2007 |
Growth direction modulation and diameter-dependent mobility in InN nanowires G Koley, Z Cai, EB Quddus, J Liu, M Qazi, RA Webb Nanotechnology 22 (29), 295701, 2011 | 23 | 2011 |
Investigation of nanoscale electronic properties of CdZnTe crystals by scanning spreading resistance microscopy J Liu, KC Mandal, G Koley Semiconductor science and technology 24 (4), 045012, 2009 | 19 | 2009 |