| Nanotribology and MEMS SH Kim, DB Asay, MT Dugger Nano today 2 (5), 22-29, 2007 | 452 | 2007 |
| Growth, structure, and tribological behavior of atomic layer-deposited tungsten disulphide solid lubricant coatings with applications to MEMS TW Scharf, SV Prasad, MT Dugger, PG Kotula, RS Goeke, RK Grubbs Acta materialia 54 (18), 4731-4743, 2006 | 245 | 2006 |
| Materials issues in microelectromechanical devices: science, engineering, manufacturability and reliability AD Romig Jr, MT Dugger, PJ McWhorter Acta Materialia 51 (19), 5837-5866, 2003 | 239 | 2003 |
| Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer WR Ashurst, C Yau, C Carraro, R Maboudian, MT Dugger Journal of Microelectromechanical Systems 10 (1), 41-49, 2001 | 236 | 2001 |
| Structural and tribological studies of MoS 2 solid lubricant films having tailored metal-multilayer nanostructures MR Hilton, R Bauer, SV Didziulis, MT Dugger, JM Keem, J Scholhamer Surface and Coatings Technology 53 (1), 13-23, 1992 | 230 | 1992 |
| Mechanistic aspects of alkylchlorosilane coupling reactions RR Rye, GC Nelson, MT Dugger Langmuir 13 (11), 2965-2972, 1997 | 187 | 1997 |
| Wear mechanisms in a reliability methodology DM Tanner, MT Dugger Reliability, testing, and characterization of MEMS/MOEMS II 4980, 22-40, 2003 | 154 | 2003 |
| In-situ vapor-phase lubrication of MEMS DB Asay, MT Dugger, SH Kim Tribology Letters 29 (1), 67-74, 2008 | 147 | 2008 |
| Macro-to nanoscale wear prevention via molecular adsorption DB Asay, MT Dugger, JA Ohlhausen, SH Kim Langmuir 24 (1), 155-159, 2008 | 143 | 2008 |
| MEMS reliability: infrastructure, test structures, experiments, and failure modes DM Tanner, NF Smith, LW IRWIN, WP Eaton, KSUE HELGESEN, ... Sandia National Labs., Albuquerque, NM (US); Sandia National Labs …, 2000 | 128 | 2000 |
| Characteristics of a commercially available silicon-on-insulator MEMS material DC Miller, BL Boyce, MT Dugger, TE Buchheit, K Gall Sensors and Actuators A: Physical 138 (1), 130-144, 2007 | 91 | 2007 |
| Friction and wear in surface-micromachined tribological test devices DC Senft, MT Dugger Micromachining and Microfabrication, 31-38, 1997 | 91 | 1997 |
| Atomic layer deposition of tungsten disulphide solid lubricant thin films TW Scharf, SV Prasad, TM Mayer, RS Goeke, MT Dugger Journal of materials research 19 (12), 3443-3446, 2004 | 84 | 2004 |
| The effect of humidity on the reliability of a surface micromachined microengine DM Tanner, JA Walraven, LW Irwin, MT Dugger, NF Smith, WP Eaton, ... 1999 IEEE International Reliability Physics Symposium Proceedings. 37th …, 1999 | 83 | 1999 |
| The effect of frequency on the lifetime of a surface micromachined microengine driving a load DM Tanner, WM Miller, WP Eaton, LW Irwin, KA Peterson, MT Dugger, ... 1998 IEEE International Reliability Physics Symposium Proceedings. 36th …, 1998 | 76 | 1998 |
| Liquid-mediated adhesion at the thin film magnetic disk/slider interface B Bhushan, MT Dugger Journal of tribology 112 (2), 217-223, 1990 | 71 | 1990 |
| Electrical contact resistance degradation of a hot-switched simulated metal MEMS contact DJ Dickrell, MT Dugger IEEE Transactions on Components and Packaging Technologies 30 (1), 75-80, 2007 | 67 | 2007 |
| Micron-scale friction and sliding wear of polycrystalline silicon thin structural films in ambient air DH Alsem, MT Dugger, EA Stach, RO Ritchie Journal of microelectromechanical systems 17 (5), 1144-1154, 2008 | 61 | 2008 |
| Real contact area measurements on magnetic rigid disks B Bhushan, MT Dugger Wear 137 (1), 41-50, 1990 | 61 | 1990 |
| Frequency dependence of the lifetime of a surface micromachined microengine driving a load DM Tanner, WM Miller, KA Peterson, MT Dugger, WP Eaton, LW Irwin, ... Microelectronics Reliability 39 (3), 401-414, 1999 | 60 | 1999 |
Seong H. KimDepartment of Chemical Engineering, Materials Research Institute, Pennsylvania State University確認したメール アドレス: engr.psu.edu