フォロー
Malte Czernohorsky
Malte Czernohorsky
Fraunhofer IPMS-CNT
確認したメール アドレス: ipms.fraunhofer.de
タイトル
引用先
引用先
Ferroelectricity in HfO2 enables nonvolatile data storage in 28 nm HKMG
J Müller, E Yurchuk, T Schlösser, J Paul, R Hoffmann, S Müller, D Martin, ...
2012 symposium on VLSI technology (VLSIT), 25-26, 2012
3352012
High endurance ferroelectric hafnium oxide-based FeFET memory without retention penalty
T Ali, P Polakowski, S Riedel, T Büttner, T Kämpfe, M Rudolph, B Pätzold, ...
IEEE Transactions on Electron Devices 65 (9), 3769-3774, 2018
2692018
A multilevel FeFET memory device based on laminated HSO and HZO ferroelectric layers for high-density storage
T Ali, P Polakowski, K Kühnel, M Czernohorsky, T Kämpfe, M Rudolph, ...
2019 IEEE International Electron Devices Meeting (IEDM), 28.7. 1-28.7. 4, 2019
1382019
Silicon doped hafnium oxide (HSO) and hafnium zirconium oxide (HZO) based FeFET: A material relation to device physics
T Ali, P Polakowski, S Riedel, T Büttner, T Kämpfe, M Rudolph, B Pätzold, ...
Applied Physics Letters 112 (22), 2018
1362018
Interface formation during molecular beam epitaxial growth of neodymium oxide on silicon
A Fissel, Z Elassar, O Kirfel, E Bugiel, M Czernohorsky, HJ Osten
Journal of applied Physics 99 (7), 2006
1292006
Impact of oxygen supply during growth on the electrical properties of crystalline Gd2O3 thin films on Si (001)
M Czernohorsky, E Bugiel, HJ Osten, A Fissel, O Kirfel
Applied Physics Letters 88 (15), 2006
1222006
Introducing crystalline rare‐earth oxides into Si technologies
HJ Osten, A Laha, M Czernohorsky, E Bugiel, R Dargis, A Fissel
physica status solidi (a) 205 (4), 695-707, 2008
1122008
CMOS integration of epitaxial Gd2O3 high-k gate dielectrics
HDB Gottlob, T Echtermeyer, T Mollenhauer, JK Efavi, M Schmidt, ...
Solid-State Electronics 50 (6), 979-985, 2006
642006
0.86-nm CET Gate Stacks With EpitaxialHigh-Dielectrics and FUSI NiSi Metal Electrodes
HDB Gottlob, T Echtermeyer, M Schmidt, T Mollenhauer, JK Efavi, ...
IEEE electron device letters 27 (10), 814-816, 2006
562006
Doping concentration dependent piezoelectric behavior of Si: HfO2 thin-films
S Kirbach, M Lederer, S Eßlinger, C Mart, M Czernohorsky, W Weinreich, ...
Applied Physics Letters 118 (1), 2021
522021
High-density energy storage in Si-doped hafnium oxide thin films on area-enhanced substrates
K Kühnel, M Czernohorsky, C Mart, W Weinreich
Journal of Vacuum Science & Technology B 37 (2), 2019
472019
A Study on the Temperature-Dependent Operation of Fluorite-Structure-Based Ferroelectric HfO2 Memory FeFET: Pyroelectricity and Reliability
T Ali, K Kühnel, M Czernohorsky, C Mart, M Rudolph, B Pätzold, ...
IEEE Transactions on Electron Devices 67 (7), 2981-2987, 2020
45*2020
Stability of crystalline Gd2O3 thin films on silicon during rapid thermal annealing
M Czernohorsky, D Tetzlaff, E Bugiel, R Dargis, HJ Osten, HDB Gottlob, ...
Semiconductor science and technology 23 (3), 035010, 2008
432008
Fluorite‐Structured Ferroelectric and Antiferroelectric Materials: A Gateway of Miniaturized Electronic Devices
F Ali, T Ali, D Lehninger, A Sünbül, A Viegas, R Sachdeva, A Abbas, ...
Advanced Functional Materials 32 (27), 2201737, 2022
422022
Piezoelectric response of polycrystalline silicon‐doped hafnium oxide thin films determined by rapid temperature cycles
C Mart, T Kämpfe, R Hoffmann, S Eßlinger, S Kirbach, K Kühnel, ...
Advanced Electronic Materials 6 (3), 1901015, 2020
402020
Integration of functional epitaxial oxides into silicon: From high-k application to nanostructures
HJ Osten, D Kühne, A Laha, M Czernohorsky, E Bugiel, A Fissel
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2007
362007
Characterization of crystalline rare-earth oxide high-K dielectrics grown by molecular beam epitaxy on silicon carbide
A Fissel, M Czernohorsky, HJ Osten
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2006
362006
Growth and characterization of crystalline gadolinium oxide on silicon carbide for high-K application
A Fissel, M Czernohorsky, HJ Osten
Superlattices and Microstructures 40 (4-6), 551-556, 2006
342006
Pyroelectric Energy Conversion in Doped Hafnium Oxide (HfO2) Thin Films on Area‐Enhanced Substrates
B Hanrahan, C Mart, T Kämpfe, M Czernohorsky, W Weinreich, A Smith
Energy Technology 7 (10), 1900515, 2019
312019
Optimizing ferroelectric and interface layers in HZO-based FTJs for neuromorphic applications
A Sünbül, T Ali, K Mertens, R Revello, D Lehninger, F Müller, M Lederer, ...
IEEE Transactions on Electron Devices 69 (2), 808-815, 2021
292021
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