| Basic mechanisms involved in the Smart-Cut® process B Aspar, M Bruel, H Moriceau, C Maleville, T Poumeyrol, AM Papon, ... Microelectronic Engineering 36 (1-4), 233-240, 1997 | 215 | 1997 |
| The generic nature of the Smart-Cut® process for thin film transfer B Aspar, H Moriceau, E Jalaguier, C Lagahe, A Soubie, B Biasse, ... Journal of Electronic Materials 30, 834-840, 2001 | 156 | 2001 |
| Effect of annealing environment on the memory properties of thin oxides with embedded Si nanocrystals obtained by low-energy ion-beam synthesis P Normand, E Kapetanakis, P Dimitrakis, D Tsoukalas, K Beltsios, ... Applied Physics Letters 83 (1), 168-170, 2003 | 143 | 2003 |
| In situ high voltage TEM observation of an electrohydrodynamic (EHD) ion source G Benassayag, P Sudraud, B Jouffrey Ultramicroscopy 16 (1), 1-8, 1985 | 142 | 1985 |
| Imaging Si nanoparticles embedded in SiO2 layers by (S) TEM-EELS S Schamm, C Bonafos, H Coffin, N Cherkashin, M Carrada, GB Assayag, ... Ultramicroscopy 108 (4), 346-357, 2008 | 105 | 2008 |
| Amorphization kinetics of germanium during ion implantation S Koffel, P Scheiblin, A Claverie, G Benassayag Journal of Applied Physics 105 (1), 2009 | 94 | 2009 |
| Dopant profiling of focused ion beam milled semiconductors using off-axis electron holography; reducing artifacts, extending detection limits and reducing the effects of … D Cooper, C Ailliot, JP Barnes, JM Hartmann, P Salles, G Benassayag, ... Ultramicroscopy 110 (5), 383-389, 2010 | 74 | 2010 |
| Transient enhanced diffusion of boron in presence of end-of-range defects C Bonafos, M Omri, B De Mauduit, G BenAssayag, A Claverie, D Alquier, ... Journal of applied physics 82 (6), 2855-2861, 1997 | 74 | 1997 |
| New characterization method of ion current‐density profile based on damage distribution of Ga+ focused‐ion beam implantation in GaAs GB Assayag, C Vieu, J Gierak, P Sudraud, A Corbin Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1993 | 72 | 1993 |
| Amorphization, recrystallization and end of range defects in germanium A Claverie, S Koffel, N Cherkashin, G Benassayag, P Scheiblin Thin Solid Films 518 (9), 2307-2313, 2010 | 66 | 2010 |
| Plasmon-resonant Raman spectroscopy in metallic nanoparticles: Surface-enhanced scattering by electronic excitations R Carles, M Bayle, P Benzo, G Benassayag, C Bonafos, G Cacciato, ... Physical Review B 92 (17), 174302, 2015 | 63 | 2015 |
| Three dimensional design of silver nanoparticle assemblies embedded in dielectrics for Raman spectroscopy enhancement and dark-field imaging R Carles, C Farcau, C Bonafos, G Benassayag, M Bayle, P Benzo, ... ACS nano 5 (11), 8774-8782, 2011 | 60 | 2011 |
| End of range defects in Ge S Koffel, N Cherkashin, F Houdellier, MJ Hytch, G Benassayag, ... Journal of Applied Physics 105 (12), 2009 | 57 | 2009 |
| The synthesis of single layers of Ag nanocrystals by ultra-low-energy ion implantation for large-scale plasmonic structures R Carles, C Farcău, C Bonafos, G Benassayag, B Pécassou, A Zwick Nanotechnology 20 (35), 355305, 2009 | 53 | 2009 |
| Si and Ge nanocrystals for future memory devices C Bonafos, M Carrada, G Benassayag, S Schamm-Chardon, J Groenen, ... Materials Science in Semiconductor Processing 15 (6), 615-626, 2012 | 50 | 2012 |
| MOS memory structures by very-low-energy-implanted Si in thin SiO2 P Dimitrakis, E Kapetanakis, P Normand, D Skarlatos, D Tsoukalas, ... Materials Science and Engineering: B 101 (1-3), 14-18, 2003 | 49 | 2003 |
| Assessing bio-available silver released from silver nanoparticles embedded in silica layers using the green algae Chlamydomonas reinhardtii as bio-sensors A Pugliara, K Makasheva, B Despax, M Bayle, R Carles, P Benzo, ... Science of the Total Environment 565, 863-871, 2016 | 47 | 2016 |
| Scaling size of the interplay between quantum confinement and surface related effects in nanostructured silicon G Seguini, C Castro, S Schamm-Chardon, G Benassayag, P Pellegrino, ... Applied Physics Letters 103 (2), 2013 | 46 | 2013 |
| Effect of ion energy and dose on the positioning of 2D-arrays of Si nanocrystals ion beam synthesised in thin SiO2 layers M Carrada, N Cherkashin, C Bonafos, G Benassayag, D Chassaing, ... Materials Science and Engineering: B 101 (1-3), 204-207, 2003 | 40 | 2003 |
| Experimental investigation of the vibrational density of states and electronic excitations in metallic nanocrystals M Bayle, P Benzo, N Combe, C Gatel, C Bonafos, G Benassayag, ... Physical Review B 89 (19), 195402, 2014 | 39 | 2014 |
