MEMS: The path to large optical crossconnects PB Chu, SS Lee, S Park IEEE Communications magazine 40 (3), 80-87, 2002 | 250 | 2002 |
Analysis of closed-loop control of parallel-plate electrostatic microgrippers PB Chu, SJ Pister Proceedings of the 1994 IEEE International Conference on Robotics and …, 1994 | 213 | 1994 |
Controlled pulse-etching with xenon difluoride PB Chu, JT Chen, R Yeh, G Lin, JCP Huang, BA Warneke, SJ Pister Proceedings of international solid state sensors and actuators conference …, 1997 | 166 | 1997 |
Gas-phase silicon micromachining with xenon difluoride FI Chang, R Yeh, G Lin, PB Chu, EG Hoffman, EJ Kruglick, KSJ Pister, ... Microelectronic structures and microelectromechanical devices for optical …, 1995 | 144 | 1995 |
Optical communication using micro corner cube reflectors PB Chu, NR Lo, EC Berg, KSJ Pister Proceedings IEEE The Tenth Annual International Workshop on Micro Electro …, 1997 | 118 | 1997 |
Dynamics of polysilicon parallel-plate electrostatic actuators PB Chu, PR Nelson, ML Tachiki, KSJ Pister Sensors and Actuators A: Physical 52 (1-3), 216-220, 1996 | 107 | 1996 |
Alignment features for heat assisted magnetic recording transducers T Rausch, WA Challener, EC Gage, CD Mihalcea, C Peng, PB Chu, ... US Patent 8,339,905, 2012 | 80 | 2012 |
Nanoprecision MEMS capacitive sensor for linear and rotational positioning JI Lee, X Huang, PB Chu Journal of Microelectromechanical Systems 18 (3), 660-670, 2009 | 76 | 2009 |
Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch PB Chu, I Brener, C Pu, SS Lee, JI Dadap, S Park, K Bergman, ... Journal of Microelectromechanical Systems 14 (2), 261-273, 2005 | 73 | 2005 |
Light delivery technique for heat assisted magnetic recording head KA Gomez, WA Challener, RA Shivarama, PB Chu US Patent 7,345,840, 2008 | 48 | 2008 |
Sidewall electrodes for electrostatic actuation and capacitive sensing DR Peale, PB Chu, S Park, NH Bonadeo, SS Lee, MJ Tsai US Patent 6,480,645, 2002 | 47 | 2002 |
Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes C Pu, S Park, PB Chu, SS Lee, M Tsai, D Peale, NH Bonadeo, I Brener IEEE Journal of Selected Topics in Quantum Electronics 10 (3), 472-477, 2004 | 41 | 2004 |
Modular MEMS-based optical cross-connect with large port-count JI Dadap, PB Chu, I Brener, C Pu, CD Lee, K Bergman, N Bonadeo, ... IEEE Photonics Technology Letters 15 (12), 1773-1775, 2003 | 41 | 2003 |
Head with optical bench for use in data storage devices EC Gage, PB Chu US Patent 7,688,689, 2010 | 35 | 2010 |
Heat assisted magnetic recording light delivery with fixed laser and rotating mirror MD Bedillion, PB Chu, KA Gomez, T Rausch, EC Gage US Patent 7,626,894, 2009 | 31 | 2009 |
Optical coupling to data recording transducer T Rausch, PB Chu US Patent 7,483,229, 2009 | 30 | 2009 |
Servo architecture for high areal density data storage MD Bedillion, PB Chu, X Huang, KA Gomez US Patent 7,570,451, 2009 | 27 | 2009 |
Optical system for data storage devices PB Chu, MI Lutwyche, T Rausch, WA Challener, TD Milster US Patent 7,796,487, 2010 | 21 | 2010 |
Adapting multichip module foundries for MEMS packaging JT Butler, VM Bright, PB Chu, RJ Saia Proceedings. 1998 International Conference on Multichip Modules and High …, 1998 | 21 | 1998 |
Optical methods for characterization of MEMS device motion PR Nelson, PB Chu, KSJ Pister Microlithography and Metrology in Micromachining 2640, 53-57, 1995 | 21 | 1995 |