| Thin-film shape-memory alloy actuated micropumps WL Benard, H Kahn, AH Heuer, MA Huff Journal of Microelectromechanical systems 7 (2), 245-251, 1998 | 550 | 1998 |
| The TiNi shape-memory alloy and its applications for MEMS H Kahn, MA Huff, AH Heuer Journal of Micromechanics and Microengineering 8 (3), 213, 1998 | 379 | 1998 |
| Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates MA Huff, M Ozgur US Patent 6,815,739, 2004 | 294 | 2004 |
| A titanium-nickel shape-memory alloy actuated micropump WL Benard, H Kahn, AH Heuer, MA Huff Proceedings of International Solid State Sensors and Actuators Conference …, 1997 | 203 | 1997 |
| Micromachined threshold pressure switch and method of manufacture MA Huff, MA Schmidt US Patent 5,164,558, 1992 | 178 | 1992 |
| MEMS-based variable capacitor MA Huff US Patent 6,909,589, 2005 | 163 | 2005 |
| A novel integrable microvalve for refreshable braille display system L Yobas, DM Durand, GG Skebe, FJ Lisy, MA Huff Journal of microelectromechanical systems 12 (3), 252-263, 2003 | 137 | 2003 |
| A pressure-balanced electrostatically-actuated microvalve MA Huff, MS Mettner, TA Lober, MA Schmidt IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop, 123-127, 1990 | 116 | 1990 |
| Method of making a microvalve M Mettner, MA Schmidt, T Lober, MA Huff US Patent 5,238,223, 1993 | 115 | 1993 |
| A novel bulk micromachined electrostatic microvalve with a curved-compliant structure applicable for a pneumatic tactile display L Yobas, MA Huff, FJ Lisy, DM Durand Journal of Microelectromechanical Systems 10 (2), 187-196, 2001 | 102 | 2001 |
| Phased array antenna using (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates MA Huff, M Ozgur US Patent 7,012,327, 2006 | 90 | 2006 |
| Design of sealed cavity microstructures formed by silicon wafer bonding MA Huff, AD Nikolich, MA Schmidt Journal of microelectromechanical systems 2 (2), 74-81, 1993 | 87 | 1993 |
| Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates MA Huff, M Ozgur US Patent 7,045,440, 2006 | 76 | 2006 |
| Flow characteristics of a pressure-balanced microvalve MA Huff, JR Gilbert, MA Schmidt Sens. Actuat, 98-101, 1993 | 75 | 1993 |
| Mechanical properties of thick, surface micromachined polysilicon films H Kahn, S Stemmer, K Nandakumar, AH Heuer, RL Mullen, R Ballarini, ... Proceedings of Ninth International Workshop on Micro Electromechanical …, 1996 | 72 | 1996 |
| A threshold pressure switch utilizing plastic deformation of silicon MA Huff, AD Nikolich, MA Schmidt TRANSDUCERS'91: 1991 International Conference on Solid-State Sensors and …, 1991 | 71 | 1991 |
| Method of making a microvalve M Mettner, MA Schmidt, T Lober, MA Huff US Patent 5,142,781, 1992 | 70 | 1992 |
| Applications of TiNi thin film shape memory alloys in micro-opto-electro-mechanical systems M Tabib-Azar, B Sutapun, M Huff Sensors and Actuators A: Physical 77 (1), 34-38, 1999 | 61 | 1999 |
| Applications of shape memory alloys in optics B Sutapun, M Tabib-Azar, MA Huff Applied optics 37 (28), 6811-6815, 1998 | 56 | 1998 |
| Fabrication, packaging, and testing of a wafer-bonded microvalve MA Huff, MA Schmidt Technical Digest IEEE Solid-State Sensor and Actuator Workshop, 194-197, 1992 | 45 | 1992 |
