Ultra-high multiplex analytical systems and methods D Zaccarin, P Lundquist, P Zhao, CF Zhong, S Turner, Y Huang, ... US Patent 8,247,216, 2012 | 166* | 2012 |
Planar microshells for vacuum encapsulated devices and damascene method of manufacture EP Quevy, P Monadgemi, RT Howe US Patent 7,923,790, 2011 | 148* | 2011 |
Design optimization and implementation of a microgravity capacitive HARPSS accelerometer P Monajemi, F Ayazi IEEE Sensors Journal 6 (1), 39-46, 2006 | 79 | 2006 |
Wafer-level MEMS packaging via thermally released metal-organic membranes P Monajemi, PJ Joseph, PA Kohl, F Ayazi Journal of micromechanics and microengineering 16 (4), 742, 2006 | 73 | 2006 |
Microshells for multi-level vacuum cavities P Monadgemi, RT Howe, EP Quevy US Patent 7,659,150, 2010 | 62 | 2010 |
Nanoscale apertures having islands of functionality S Turner, R Kuse, G Kearns, P Monadgemi, M Foquet, D Martinez US Patent 9,637,380, 2017 | 56 | 2017 |
Micromirror arrays having self aligned features P Monadgemi US Patent 8,335,029, 2012 | 55 | 2012 |
A low cost wafer-level MEMS packaging technology P Monajemi, F Ayazi, PJ Joseph, PA Kohl 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005 …, 2005 | 46 | 2005 |
Wafer-level packaging of micromechanical resonators PJ Joseph, P Monajemi, F Ayazi, PA Kohl IEEE transactions on advanced packaging 30 (1), 19-26, 2007 | 44 | 2007 |
High-Q integrated inductors on trenched silicon islands M Raieszadeh, P Monajemi, SW Yoon, J Laskar, F Ayazi 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005 …, 2005 | 41 | 2005 |
Low stress thin film microshells P Monadgemi, EP Quevy, RT Howe US Patent 7,595,209, 2009 | 34 | 2009 |
Thin film microshells incorporating a getter layer P Monadgemi, EP Quevy, RT Howe US Patent 7,736,929, 2010 | 26 | 2010 |
Design and fabrication of integrated RF modules in liquid crystalline polymer (LCP) substrates M Swaminathan, A Bavisi, W Yun, V Sundaram, V Govind, P Monajemi 31st Annual Conference of IEEE Industrial Electronics Society, 2005. IECON …, 2005 | 26 | 2005 |
Microelectromechanical systems structures and self-aligned high aspect-ratio combined poly and single-crystal silicon fabrication processes for producing same F Ayazi, M Raieszadeh, P Monadgemi US Patent 7,977,136, 2011 | 18 | 2011 |
Design of novel highly integrated passive devices for digital broadcasting satellite/802.11 home networking solution in liquid crystal polymer (LCP) based organic substrates V Govind, P Monajemi, L Carastro, S Lapushin, C Russell, S Dalmia, ... 2006 IEEE MTT-S International Microwave Symposium Digest, 1157-1160, 2006 | 16 | 2006 |
Characterization of a polymer-based MEMS packaging technique P Monajemi, PJ Joseph, PA Kohl, F Ayazi 2006 11th International Symposium on Advanced Packaging Materials: Processes …, 2006 | 12 | 2006 |
A high-g low-voltage HARPSS tunable capacitor P Monajemi, F Ayazi IEEE MTT-S International Microwave Symposium Digest, 2005., 749-752, 2005 | 11 | 2005 |
Thick single-crystal silicon MEMS with high-aspect-ratio vertical air-gaps P Monajemi, F Ayazi Micromachining and Microfabrication Process Technology X 5715, 138-147, 2005 | 11 | 2005 |
Low-voltage large-value tunable capacitors using selfaligned HARPSS M Rais-Zadeh, AK Samarao, P Monajemi, F Ayazi 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems …, 2008 | 8 | 2008 |
Design and process optimization of through silicon via interposer for 3D-Ic integration P Monajemi, M Newman, C Uzoh, C Woychik, T Caskey International Symposium on Microelectronics 2012 (1), 000268-000275, 2012 | 6 | 2012 |