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Khaled Ahmed, PhD
Khaled Ahmed, PhD
Verifisert e-postadresse på intel.com - Startside
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Plasma treatment of hafnium-containing materials
S Muthukrishnan, R Sharangpani, T Goyani, P Narwankar, S Kher, ...
US Patent App. 11/167,070, 2006
6842006
Atomic layer deposition processes for non-volatile memory devices
Y Ma, SS Kher, K Ahmed, T Goyani, M Mahajani, J Ravi, YC Huang
US Patent 7,659,158, 2010
6122010
Characterization of ultra-thin oxides using electrical CV and IV measurements
JR Hauser, K Ahmed
AIP Conference Proceedings 449 (1), 235-239, 1998
4781998
Devices including metal-silicon contacts using indium arsenide films and apparatus and methods
KZ Ahmed, P Gopalraja, A Noori, M Chang
US Patent 9,190,320, 2015
3732015
Methods for Rapid Generation of ALD Saturation Curves Using Segmented Spatial ALD
F Greer, K Ahmed, CA Chen, W Zhu
US Patent App. 14/135,266, 2015
2482015
Modeled tunnel currents for high dielectric constant dielectrics
EM Vogel, KZ Ahmed, B Hornung, WK Henson, PK McLarty, G Lucovsky, ...
IEEE Transactions on Electron Devices 45 (6), 1350-1355, 2002
2252002
Estimating oxide thickness of tunnel oxides down to 1.4 nm using conventional capacitance-voltage measurements on MOS capacitors
WK Henson, KZ Ahmed, EM Vogel, JR Hauser, JJ Wortman, RD Venables, ...
IEEE Electron Device Letters 20 (4), 179-181, 1999
1971999
Methods and apparatus for forming tantalum silicate layers on germanium or III-V semiconductor devices
JW Anthis, KZ Ahmed
US Patent 8,993,058, 2015
1892015
Characterization and metrology for ULSI technology
JR Hauser, K Ahmed
AIP Conf. Proc 449, 235-239, 1998
1591998
On the physical mechanism of NBTI in silicon oxynitride p-MOSFETs: Can differences in insulator processing conditions resolve the interface trap generation versus hole trapping …
S Mahapatra, K Ahmed, D Varghese, AE Islam, G Gupta, L Madhav, ...
2007 IEEE International Reliability Physics Symposium Proceedings. 45th …, 2007
1512007
On the dispersive versus Arrhenius temperature activation of NBTI time evolution in plasma nitrided gate oxides: Measurements, theory, and implications
D Varghese, D Saha, S Mahapatra, K Ahmed, F Nouri, M Alam
IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest …, 2005
1462005
Transistor wars
K Ahmed, K Schuegraf
IEEE Spectrum 48 (11), 50-66, 2011
1252011
Vapor deposition of hafnium silicate materials with tris (dimethylamino) silane
S Muthukrishnan, T Goyani, R Sharangpani, S Kher, P Narwankar, ...
US Patent App. 11/223,896, 2006
1182006
Method for fabricating a dielectric stack
P Narwankar, S Kher, S Muthukrishnan, R Sharangpani, P Kraus, C Olsen, ...
US Patent App. 11/298,553, 2006
1162006
pMOSFET with 200% mobility enhancement induced by multiple stressors
L Washington, F Nouri, S Thirupapuliyur, G Eneman, P Verheyen, ...
IEEE Electron Device Letters 27 (6), 511-513, 2006
912006
A unified model for insulator selection to form ultra-low resistivity metal-insulator-semiconductor contacts to n-Si, n-Ge, and n-InGaAs
A Agrawal, N Shukla, K Ahmed, S Datta
Applied Physics Letters 101 (4), 2012
902012
Material dependence of NBTI physical mechanism in silicon oxynitride (SiON) p-MOSFETs: a comprehensive study by ultra-fast on-the-fly (UF-OTF) I DLIN technique
EN Kumar, VD Maheta, S Purawat, AE Islam, C Olsen, K Ahmed, MA Alam, ...
2007 IEEE international electron devices meeting, 809-812, 2007
692007
Gate electrode dopant activation method for semiconductor manufacturing including a laser anneal
Y Ma, KZ Ahmed, KL Cunningham, RC McIntosh, AJ Mayur, H Liang, ...
US Patent 7,078,302, 2006
632006
Gate leakage vs. NBTI in plasma nitrided oxides: Characterization, physical principles, and optimization
AE Islam, G Gupta, S Mahapatra, AT Krishnan, K Ahmed, F Nouri, A Oates, ...
2006 international electron devices meeting, 1-4, 2006
622006
Impact of tunnel currents and channel resistance on the characterization of channel inversion layer charge and polysilicon-gate depletion of sub-20-/spl Aring/gate oxide MOSFETs
K Ahmed, E Ibok, GCF Yeap, Q Xiang, B Ogle, JJ Wortman, JR Hauser
IEEE Transactions on Electron Devices 46 (8), 1650-1655, 1999
561999
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