| Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition L Tian, S Ponton, M Benz, A Crisci, R Reboud, G Giusti, F Volpi, ... Surface and Coatings Technology 347, 181-190, 2018 | 36 | 2018 |
| A chemical vapor deposition route to epitaxial superconducting NbTiN thin films N Tsavdaris, D Harza, S Coindeau, G Renou, F Robaut, E Sarigiannidou, ... Chemistry of Materials 29 (14), 5824-5830, 2017 | 18 | 2017 |
| Growth of boron nitride on (0001) AlN templates by high temperature-hydride vapor phase epitaxy (HT-HVPE) N Coudurier, R Boichot, F Mercier, R Reboud, S Lay, E Blanquet, M Pons Physics Procedia 46, 102-106, 2013 | 18 | 2013 |
| Improved critical temperature of superconducting plasma-enhanced atomic layer deposition of niobium nitride thin films by thermal annealing L Tian, I Bottala-Gambetta, V Marchetto, M Jacquemin, A Crisci, ... Thin Solid Films 709, 138232, 2020 | 14 | 2020 |
| Growth of boron nitride films on w‐AlN (0001), 4° off‐cut 4H‐SiC (0001), W (110) and Cr (110) substrates by Chemical Vapor Deposition N Coudurier, M Chubarov, R Boichot, F Mercier, E Blanquet, R Reboud, ... Crystal research and technology 51 (3), 231-238, 2016 | 12 | 2016 |
| Growth of aluminum nitride on flat and patterned Si (111) by high temperature halide CVD M Chubarov, F Mercier, S Lay, F Charlot, A Crisci, S Coindeau, T Encinas, ... Thin Solid Films 623, 65-71, 2017 | 6 | 2017 |
| Investigation of liquid oxide interactions with refractory substrates via sessile drop method A Tandjaoui, M Cherif, L Carroz, J Sanchez, R Reboud, C Garnier, ... Journal of Materials Science 51, 1701-1712, 2016 | 6 | 2016 |
| Method for functionalizing a polymer-based substrate by chemical deposition of a thin layer E Gicquel, F Mercier, R Boichot, E Blanquet, E Mauret, R Reboud, J Bras US Patent App. 18/006,335, 2023 | | 2023 |
| Stress control of AlN-based multilayer coatings with amorphous intermediate layers V Tabouret, R Reboud, A Crisci, F Mercier 48th International Conference on Metallurgical Coatings and Thin Films …, 2022 | | 2022 |
| Superconducting properties of NbN thin films deposited by plasma enhanced atomic layer deposition using a metalorganic precursor F Mercier, L Tian, E Blanquet, I Bottala-Gambetta, V Marchetto, ... EuroCVD 22-Baltic ALD 16 Conference, 2019 | | 2019 |
| Grain structure of multi-crystalline silicon: x-ray synchrotron imaging characterization A Tandjaoui, R Reboud, C Garnier, T Duffar International Workshop of Crystal Growth Technology, 2014 | | 2014 |
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