High figure-of-merit Lamb wave resonators based on Al0. 7Sc0. 3N thin film S Shao, Z Luo, T Wu
IEEE Electron Device Letters 42 (9), 1378-1381, 2021
53 2021 High quality co-sputtering alscn thin films for piezoelectric lamb-wave resonators S Shao, Z Luo, Y Lu, A Mazzalai, C Tosi, T Wu
Journal of Microelectromechanical Systems 31 (3), 328-337, 2022
33 2022 Characterization of AlN and AlScN film ICP etching for micro/nano fabrication Z Luo, S Shao, T Wu
Microelectronic Engineering 242, 111530, 2021
30 2021 Low Loss Al0.7 Sc0.3 N Thin Film Acoustic Delay Lines S Shao, Z Luo, Y Lu, A Mazzalai, C Tosi, T Wu
IEEE Electron Device Letters 43 (4), 647-650, 2022
25 2022 Al0.78 Sc0.22 N Lamb Wave Contour Mode Resonators Z Luo, S Shao, T Wu
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 69 …, 2021
24 2021 Characterization of Ferroelectric Al 0.7 Sc 0.3 N Thin Film on Pt and Mo Electrodes R Nie, S Shao, Z Luo, X Kang, T Wu
Micromachines 13 (10), 1629, 2022
20 2022 Al0. 7Sc0. 3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2· Qm) over 146 Z Luo, S Shao, K Liu, Y Lu, A Mazzalai, C Tosi, T Wu
Applied Physics Letters 120 (17), 2022
19 2022 Aluminum nitride thin film based reconfigurable integrated photonic devices Z Luo, A Zhang, W Huang, S Shao, Y Liu, T Wu, Y Zou
IEEE Journal of Selected Topics in Quantum Electronics 29 (3: Photon. Elec …, 2023
14 2023 Optimization of AlN and AlScN film ICP etching Z Luo, S Shao, T Wu
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021
9 2021 Optimization of S1 Lamb wave resonators with A10. 8Sc0. 2N S Shao, Z Luo, T Wu
2021 IEEE 16th International Conference on Nano/Micro Engineered and …, 2021
8 2021 AlN Contour Mode Resonators with Half Circle Shaped Reflectors Z Luo, S Shao, T Wu
2021 IEEE 16th International Conference on Nano/Micro Engineered and …, 2021
6 2021 Design and fabrication of Lamb wave resonator based on 15% scandium-doped aluminum nitride thin film S Shao, Z Luo, T Wu
2021 21st International Conference on Solid-State Sensors, Actuators and …, 2021
5 2021 Electro-acoustic Phase Modulator based on AlScN Thin Film S Shao, Z Luo, T Wu
IEEE Electron Device Letters 44 (5), 817-820, 2023
4 2023 Multiferroic Magnetic Sensor Based on AlN and Al0.7 Sc0.3 N thin film Y Wang, K Liu, S Shao, J Kim, T Wu
2021 IEEE international Ultrasonics symposium (IUS), 1-4, 2021
4 2021 Non-Invasive Carotid Artery Monitoring by Using Aluminum Nitride Pmut Close-Packed Arrays S Wu, K Liu, S Shao, W Li, Y Chen, T Wu, X Li
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems …, 2023
3 2023 Lorentz-force gyrator based on AlScN piezoelectric thin film S Shao, Z Luo, K Liu, T Wu
Applied Physics Letters 121 (21), 2022
3 2022 Wide bandwidth lorentz-force magnetometer based on lateral overtone bulk acoustic resonator S Shao, A Gao, Y Wang, T Wu
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021
3 2021 Ultra-Compact and High-Performance Suspended Aluminum Scandium Nitride Lamb Wave Humidity Sensor with Graphene Oxide Layer Z Luo, D Li, X Le, T He, S Shao, Q Lv, Z Liu, C Lee, T Wu
Nanoscale, 2024
2 2024 Sub-6dB Aluminum Scandium Nitride Acoustic Delay Lines S Shao, Z Luo, T Wu
2022 IEEE International Ultrasonics Symposium (IUS), 1-4, 2022
2 2022 Topological valley Hall edge state of lamb wave in aluminum scandium nitride thin film Z Luo, S Shao, C Lee, T Wu
2023 IEEE 23rd International Conference on Nanotechnology (NANO), 380-383, 2023
1 2023 
Tao WuShanghaiTech UniversityZweryfikowany adres z shanghaitech.edu.cn