A high-bandwidth MEMS nanopositioner for on-chip AFM: Design, characterization, and control M Maroufi, A Bazaei, SOR Moheimani
IEEE Transactions on Control Systems Technology 23 (2), 504-512, 2014
54 2014 MEMS for Nanopositioning: Design and Applications M Maroufi, A Fowler, SOR Moheimani
Journal of Microelectromechanical Systems, 1 - 32, 2017
48 2017 On-chip dynamic mode atomic force microscopy: A silicon-on-insulator MEMS approach MG Ruppert, AG Fowler, M Maroufi, SOR Moheimani
Journal of Microelectromechanical Systems 26 (1), 215-225, 2016
47 2016 An adjustable-stiffness MEMS force sensor: Design, characterization, and control M Maroufi, H Alemansour, MB Coskun, SOR Moheimani
Mechatronics 56, 198-210, 2018
42 2018 A 2DOF SOI-MEMS Nanopositioner with Tilted Flexure Bulk Piezoresistive Displacement Sensors M Maroufi, SO Moheimani
IEEE Sensors Journal 16, 1908-1917, 2016
42 2016 Iterative learning control for video-rate atomic force microscopy N Nikooienejad, M Maroufi, SOR Moheimani
IEEE/ASME Transactions on Mechatronics 26 (4), 2127-2138, 2020
41 2020 High-stroke silicon-on-insulator MEMS nanopositioner: Control design for non-raster scan atomic force microscopy M Maroufi, AG Fowler, A Bazaei, SO Moheimani
Review of Scientific Instruments 86 (2), 2015
38 2015 Compressibility Behaviour of Warp Knitted Spacer Fabrics Based on Elastic Curved Bar Theory F Mokhtari, M Shamshirsaz, M Latifi, M Maroufi
Journal of Engineered Fibers and Fabrics 6 (4), 23-33, 2011
38 2011 Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners A Bazaei, M Maroufi, AG Fowler, SOR Moheimani
IEEE Transactions on Control Systems Technology, 2016
37 2016 MB Coskun, H Alemansour, AG Fowler, M Maroufi, SOR Moheimani
IEEE Transactions on Control Systems Technology 27 (5), 2271-2278, 2018
34 2018 On-chip feedthrough cancellation methods for microfabricated AFM cantilevers with integrated piezoelectric transducers MB Coskun, AG Fowler, M Maroufi, SOR Moheimani
Journal of Microelectromechanical Systems 26 (6), 1287-1297, 2017
33 2017 Optimal design analysis of electrothermally driven microactuators SM Karbasi, M Shamshirsaz, M Naraghi, M Maroufi
Microsystem technologies 16, 1065-1071, 2010
33 2010 Video-rate non-raster AFM imaging with cycloid trajectory N Nikooienejad, A Alipour, M Maroufi, SOR Moheimani
IEEE Transactions on Control Systems Technology 28 (2), 436-447, 2018
28 2018 Tilted beam piezoresistive displacement sensor: Design, modeling, and characterization M Maroufi, A Bazaei, A Mohammadi, SOR Moheimani
Journal of Microelectromechanical Systems 24 (5), 1594-1605, 2015
25 2015 Displacement sensing with silicon flexures in MEMS nanopositioners A Bazaei, M Maroufi, A Mohammadi, SOR Moheimani
Journal of microelectromechanical systems 23 (3), 502-504, 2014
25 2014 Design, fabrication and characterization of a high-bandwidth 2DOF MEMS nanopositioner M Maroufi, SOR Moheimani
2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics …, 2013
23 2013 Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design N Nikooienejad, M Maroufi, SO Moheimani
Review of Scientific Instruments 90 (7), 2019
18 2019 A high dynamic range closed-loop stiffness-adjustable MEMS force sensor M Maroufi, H Alemansour, SOR Moheimani
Journal of Microelectromechanical Systems 29 (3), 397-407, 2020
15 2020 Size effect on performance of resonant piezoelectric millimeter-sized cantilevers using as liquid level detection sensors M Maroufi, M Shamshirsaz
2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 42-46, 2012
13 2012 Tracking control of constant-linear-velocity spiral reference by LQG method A Bazaei, M Maroufi, SOR Moheimani
IFAC-PapersOnLine 50 (1), 15568-15573, 2017
12 2017 
Reza MoheimaniProfessor & James Von Ehr Distinguished Chair, Dept of Systems Engineering, UT-DallasZweryfikowany adres z utdallas.edu
