A large-scan-angle piezoelectric MEMS optical scanner actuated by a Nb-doped PZT thin film T Naono, T Fujii, M Esashi, S Tanaka Journal of Micromechanics and Microengineering 24 (1), 015010, 2013 | 76 | 2013 |
Display device T Fujii, A Harada US Patent 6,967,763, 2005 | 68 | 2005 |
Display device T Fujii, A Oosawa US Patent 7,180,677, 2007 | 64 | 2007 |
Piezoelectric element and method for manufacturing piezoelectric element T Fujii, T Naono US Patent App. 15/137,142, 2016 | 63 | 2016 |
Non-resonant 2-D piezoelectric MEMS optical scanner actuated by Nb doped PZT thin film T Naono, T Fujii, M Esashi, S Tanaka Sensors and Actuators A: Physical 233, 147-157, 2015 | 53 | 2015 |
Process for manufacting a piezoelectric device T Fujii, Y Nihei, Y Hishinuma, T Mita US Patent 7,958,608, 2011 | 53 | 2011 |
Characterization of Nb-doped Pb (Zr, Ti) O3 films deposited on stainless steel and silicon substrates by RF-magnetron sputtering for MEMS applications T Fujii, Y Hishinuma, T Mita, T Naono Sensors and Actuators A: Physical 163 (1), 220-225, 2010 | 46 | 2010 |
Phase difference plate comprising polymer film containing compound having rod-shaped molecular structure H Takeuchi, H Sata, H Kawanishi, T Fujii US Patent 7,060,333, 2006 | 41 | 2006 |
Preparation of Nb doped PZT film by RF sputtering T Fujii, Y Hishinuma, T Mita, T Arakawa Solid State Communications 149 (41-42), 1799-1802, 2009 | 35 | 2009 |
Effects of He gas addition on the production of active particles in rf magnetron sputtering K Harada, S Kishida, T Matsuoka, T Maruyama, H Tokutaka, K Fujimura, ... Japanese journal of applied physics 35 (6R), 3590, 1996 | 28 | 1996 |
Piezoelectric device, method of actuating the same, piezoelectric apparatus, and liquid discharge apparatus Y Sakashita, T Fujii, Y Hishinuma US Patent 7,845,767, 2010 | 25 | 2010 |
Piezoelectric devices, process for producing the piezoelectric device, and inkjet recording head T Fujii US Patent 7,652,408, 2010 | 24 | 2010 |
Method of manufacturing ceramic film and structure including ceramic film Y Sakashita, T Fujii US Patent 7,544,244, 2009 | 22 | 2009 |
Preparation of Cu–O Films by Sputtering Using He Gas T Fujii, T Koyanagi, K Morofuji, TKT Kashima, KMK Matsubara Japanese journal of applied physics 33 (7S), 4482, 1994 | 20 | 1994 |
Piezoelectric device, piezoelectric actuator, and liquid discharge device having piezoelectric films T Fujii, T Mita, Y Hishinuma US Patent 7,768,178, 2010 | 19 | 2010 |
Phase Difference Compensator, Light Modurating System, Liquid Crystal Display and Liquid Crystal Projector K Nakagawa, T Fujii US Patent App. 11/792,069, 2007 | 18 | 2007 |
Ferroelectric film, process for producing the same, ferroelectric device, and liquid discharge device T Arakawa, T Fujii US Patent 8,100,513, 2012 | 16 | 2012 |
Piezoelectric device and method of manufacturing piezoelectric device T Fujii, Y Hishinuma US Patent 9,136,459, 2015 | 14 | 2015 |
Actuator, actuator structure and method of manufacturing actuator T Fujii, Y Hirabayashi US Patent 8,710,716, 2014 | 14 | 2014 |
Piezoelectric device and method of manufacturing the same, and electronic device manufacturing method T Fujii, A Mukaiyama US Patent App. 13/837,420, 2013 | 14 | 2013 |