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takamichi fujii
takamichi fujii
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A large-scan-angle piezoelectric MEMS optical scanner actuated by a Nb-doped PZT thin film
T Naono, T Fujii, M Esashi, S Tanaka
Journal of Micromechanics and Microengineering 24 (1), 015010, 2013
762013
Display device
T Fujii, A Harada
US Patent 6,967,763, 2005
682005
Display device
T Fujii, A Oosawa
US Patent 7,180,677, 2007
642007
Piezoelectric element and method for manufacturing piezoelectric element
T Fujii, T Naono
US Patent App. 15/137,142, 2016
632016
Non-resonant 2-D piezoelectric MEMS optical scanner actuated by Nb doped PZT thin film
T Naono, T Fujii, M Esashi, S Tanaka
Sensors and Actuators A: Physical 233, 147-157, 2015
532015
Process for manufacting a piezoelectric device
T Fujii, Y Nihei, Y Hishinuma, T Mita
US Patent 7,958,608, 2011
532011
Characterization of Nb-doped Pb (Zr, Ti) O3 films deposited on stainless steel and silicon substrates by RF-magnetron sputtering for MEMS applications
T Fujii, Y Hishinuma, T Mita, T Naono
Sensors and Actuators A: Physical 163 (1), 220-225, 2010
462010
Phase difference plate comprising polymer film containing compound having rod-shaped molecular structure
H Takeuchi, H Sata, H Kawanishi, T Fujii
US Patent 7,060,333, 2006
412006
Preparation of Nb doped PZT film by RF sputtering
T Fujii, Y Hishinuma, T Mita, T Arakawa
Solid State Communications 149 (41-42), 1799-1802, 2009
352009
Effects of He gas addition on the production of active particles in rf magnetron sputtering
K Harada, S Kishida, T Matsuoka, T Maruyama, H Tokutaka, K Fujimura, ...
Japanese journal of applied physics 35 (6R), 3590, 1996
281996
Piezoelectric device, method of actuating the same, piezoelectric apparatus, and liquid discharge apparatus
Y Sakashita, T Fujii, Y Hishinuma
US Patent 7,845,767, 2010
252010
Piezoelectric devices, process for producing the piezoelectric device, and inkjet recording head
T Fujii
US Patent 7,652,408, 2010
242010
Method of manufacturing ceramic film and structure including ceramic film
Y Sakashita, T Fujii
US Patent 7,544,244, 2009
222009
Preparation of Cu–O Films by Sputtering Using He Gas
T Fujii, T Koyanagi, K Morofuji, TKT Kashima, KMK Matsubara
Japanese journal of applied physics 33 (7S), 4482, 1994
201994
Piezoelectric device, piezoelectric actuator, and liquid discharge device having piezoelectric films
T Fujii, T Mita, Y Hishinuma
US Patent 7,768,178, 2010
192010
Phase Difference Compensator, Light Modurating System, Liquid Crystal Display and Liquid Crystal Projector
K Nakagawa, T Fujii
US Patent App. 11/792,069, 2007
182007
Ferroelectric film, process for producing the same, ferroelectric device, and liquid discharge device
T Arakawa, T Fujii
US Patent 8,100,513, 2012
162012
Piezoelectric device and method of manufacturing piezoelectric device
T Fujii, Y Hishinuma
US Patent 9,136,459, 2015
142015
Actuator, actuator structure and method of manufacturing actuator
T Fujii, Y Hirabayashi
US Patent 8,710,716, 2014
142014
Piezoelectric device and method of manufacturing the same, and electronic device manufacturing method
T Fujii, A Mukaiyama
US Patent App. 13/837,420, 2013
142013
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