| Atomic layer deposition: an overview SM George Chemical reviews 110 (1), 111-131, 2010 | 6903 | 2010 |
| Low-Temperature Al2O3 Atomic Layer Deposition MD Groner, FH Fabreguette, JW Elam, SM George Chemistry of materials 16 (4), 639-645, 2004 | 1819 | 2004 |
| Surface chemistry for atomic layer growth SM George, AW Ott, JW Klaus The Journal of Physical Chemistry 100 (31), 13121-13131, 1996 | 962 | 1996 |
| Hydrogen desorption kinetics from monohydride and dihydride species on silicon surfaces P Gupta, VL Colvin, SM George Physical Review B 37 (14), 8234, 1988 | 778 | 1988 |
| Al3O3 thin film growth on Si (100) using binary reaction sequence chemistry AW Ott, JW Klaus, JM Johnson, SM George Thin Solid Films 292 (1-2), 135-144, 1997 | 754 | 1997 |
| Conformal coating on ultrahigh-aspect-ratio nanopores of anodic alumina by atomic layer deposition JW Elam, D Routkevitch, PP Mardilovich, SM George Chemistry of materials 15 (18), 3507-3517, 2003 | 749 | 2003 |
| Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition JW Elam, MD Groner, SM George Review of Scientific Instruments 73 (8), 2981-2987, 2002 | 739 | 2002 |
| Ultrathin direct atomic layer deposition on composite electrodes for highly durable and safe Li-ion batteries YS Jung, AS Cavanagh, LA Riley, SH Kang, AC Dillon, MD Groner, ... Advanced Materials 22 (19), 2172, 2010 | 655 | 2010 |
| Method for hafnium nitride deposition C Metzner, S Kher, Y Kim, M Rocklein, S George US Patent App. 10/407,930, 2004 | 631 | 2004 |
| Surface chemistry of Al2O3 deposition using Al (CH3) 3 and H2O in a binary reaction sequence AC Dillon, AW Ott, JD Way, SM George Surface Science 322 (1-3), 230-242, 1995 | 613 | 1995 |
| Method for hafnium nitride deposition C Metzner, S Kher, YK Kim, MN Rocklein, SM George US Patent 7,547,952, 2009 | 574 | 2009 |
| Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers PF Carcia, RS McLean, MH Reilly, MD Groner, SM George Applied physics letters 89 (3), 2006 | 538 | 2006 |
| Gas diffusion barriers on polymers using Al2O3 atomic layer deposition MD Groner, SM George, RS McLean, PF Carcia Applied Physics Letters 88 (5), 2006 | 534 | 2006 |
| Nucleation and Growth during Al2O3 Atomic Layer Deposition on Polymers CA Wilson, RK Grubbs, SM George Chemistry of Materials 17 (23), 5625-5634, 2005 | 523 | 2005 |
| Growth of ZnO/Al2O3 Alloy Films Using Atomic Layer Deposition Techniques JW Elam, SM George Chemistry of Materials 15 (4), 1020-1028, 2003 | 503 | 2003 |
| Gas diffusion barriers on polymers using multilayers fabricated by Al2O3 and rapid SiO2 atomic layer deposition AA Dameron, SD Davidson, BB Burton, PF Carcia, RS McLean, ... The Journal of Physical Chemistry C 112 (12), 4573-4580, 2008 | 502 | 2008 |
| Enhanced stability of LiCoO2 cathodes in lithium-ion batteries using surface modification by atomic layer deposition YS Jung, AS Cavanagh, AC Dillon, MD Groner, SM George, SH Lee Journal of The Electrochemical Society 157 (1), A75, 2009 | 493 | 2009 |
| Ultra-low thermal conductivity in W/Al2O3 nanolaminates RM Costescu, DG Cahill, FH Fabreguette, ZA Sechrist, SM George Science 303 (5660), 989-990, 2004 | 478 | 2004 |
| Ultrathin Coatings on Nano-LiCoO2 for Li-Ion Vehicular Applications ID Scott, YS Jung, AS Cavanagh, Y Yan, AC Dillon, SM George, SH Lee Nano letters 11 (2), 414-418, 2011 | 475 | 2011 |
| Surface chemistry for molecular layer deposition of organic and hybrid organic− inorganic polymers SM George, B Yoon, AA Dameron Accounts of chemical research 42 (4), 498-508, 2009 | 463 | 2009 |
