LIGA micropump for gases and liquids R Rapp, WK Schomburg, D Maas, J Schulz, W Stark
Sensors and Actuators A: Physical 40 (1), 57-61, 1994
217 1994 Experimental results from a preclinical X-ray phase-contrast CT scanner A Tapfer, M Bech, A Velroyen, J Meiser, J Mohr, M Walter, J Schulz, ...
Proceedings of the National Academy of Sciences 109 (39), 15691-15696, 2012
189 2012 Radially polarized MA Ahmed, J Schulz, A Voss, O Parriaux, JC Pommier, T Graf
Optics Letters 32 (13), 1824-1826, 2007
131 2007 High aspect ratio gratings for X-ray phase contrast imaging J Mohr, T Grund, D Kunka, J Kenntner, J Leuthold, J Meiser, J Schulz, ...
AIP Conference proceedings 1466 (1), 41-50, 2012
101 2012 Fully batch fabricated magnetic microactuators using a two layer LIGA process B Rogge, J Schulz, J Mohr, A Thommes, W Menz
Proceedings of the International Solid-State Sensors and Actuators …, 1995
65 1995 Development of a prototype gantry system for preclinical x‐ray phase‐contrast computed tomography A Tapfer, M Bech, B Pauwels, X Liu, P Bruyndonckx, A Sasov, J Kenntner, ...
Medical physics 38 (11), 5910-5915, 2011
58 2011 DoseSim: Microsoft-Windows graphical user interface for using synchrotron x-ray exposure and subsequent development in the LIGA process P Meyer, J Schulz, L Hahn
Review of Scientific Instruments 74 (2), 1113-1119, 2003
50 2003 Adhesion problems in deep-etch X-ray lithography caused by fluorescence radiation from the plating base FJ Pantenburg, J Chlebek, A El-Kholi, HL Huber, J Mohr, HK Oertel, ...
Microelectronic Engineering 23 (1-4), 223-226, 1994
47 1994 Investigations of the development rate of irradiated PMMA microstructures in deep X-ray lithography P Meyer, A El-Kholi, J Schulz
Microelectronic Engineering 63 (4), 319-328, 2002
45 2002 Gas permeability of adhesives and their application for hermetic packaging of microcomponents A Gerlach, W Keller, J Schulz, K Schumacher
Microsystem Technologies 7, 17-22, 2001
45 2001 Increasing the field of view in grating based X-ray phase contrast imaging using stitched gratings J Meiser, M Willner, T Schröter, A Hofmann, J Rieger, F Koch, ...
Journal of X-ray science and technology 24 (3), 379-388, 2016
33 2016 Why you will use the deep X-ray LIG (A) technology to produce MEMS? P Meyer, J Schulz, L Hahn, V Saile
Microsystem Technologies 14, 1491-1497, 2008
30 2008 Lithographic fabrication of mold inserts M Guttmann, J Schulz, V Saile
Advanced Micro and Nanosystems 3. Microengineering of Metals and Ceramics, 2005
27 2005 Radially polarized high-power lasers MA Ahmed, A Voß, MM Vogel, A Austerschulte, J Schulz, V Metsch, ...
XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power …, 2009
25 2009 Note: Gratings on low absorbing substrates for x-ray phase contrast imaging FJ Koch, TJ Schröter, D Kunka, P Meyer, J Meiser, A Faisal, MI Khalil, ...
Review of Scientific Instruments 86 (12), 2015
24 2015 Deep x-ray lithography P Meyer, J Schulz, V Saile
Micromanufacturing Engineering and Technology, 365-391, 2010
24 2010 LIGA technology today and its industrial applications SJ Chung, H Hein, J Mohr, FJ Pantenburg, J Schulz, U Wallrabe
Microrobotics and Microassembly II 4194, 44-55, 2000
22 2000 Characterization method for new resist formulations for HAR patterns made by X-ray lithography D Kunka, J Mohr, V Nazmov, J Meiser, P Meyer, M Amberger, F Koch, ...
Microsystem technologies 20, 2023-2029, 2014
18 2014 Magnetic microactuators fabricated by the LIGA-technique for large displacements or large forces B Rogge, J Schulz, J Mohr, A Thommes, W Menz
Proc. Actuator 96, 112-115, 1996
18 1996 Non-destructive characterisation of out-of-plane fibre waviness in carbon fibre reinforced polymers by X-ray dark-field radiography J Glinz, M Thor, J Schulz, S Zabler, J Kastner, S Senck
Nondestructive Testing and Evaluation 37 (5), 497-507, 2022
17 2022 