| Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature J Pilz, A Perrotta, P Christian, M Tazreiter, R Resel, G Leising, T Griesser, ... Journal of Vacuum Science & Technology A 36 (1), 2018 | 41 | 2018 |
| Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition T Abu Ali, J Pilz, P Schäffner, M Kratzer, C Teichert, B Stadlober, ... physica status solidi (a) 217 (21), 2000319, 2020 | 36 | 2020 |
| ZnO thin films grown by plasma‐enhanced atomic layer deposition: material properties within and outside the “atomic layer deposition window” J Pilz, A Perrotta, G Leising, AM Coclite physica status solidi (a) 217 (8), 1900256, 2020 | 25 | 2020 |
| Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study A Perrotta, J Pilz, A Milella, AM Coclite Applied Surface Science 483, 10-18, 2019 | 23 | 2019 |
| Vapor phase infiltration of zinc oxide into thin films of cis-polyisoprene rubber J Pilz, AM Coclite, MD Losego Materials Advances 1 (6), 1695-1704, 2020 | 12 | 2020 |
| On the transformation of “zincone”-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition A Perrotta, J Pilz, S Pachmajer, A Milella, AM Coclite Beilstein journal of nanotechnology 10 (1), 746-759, 2019 | 12 | 2019 |
| Raman Spectroscopy and Spectral Signatures of AlScN/Al2O3 D Solonenko, A Žukauskaitė, J Pilz, M Moridi, S Risquez Micromachines 13 (11), 1961, 2022 | 11 | 2022 |
| Initial growth and crystallization onset of plasma enhanced-atomic layer deposited ZnO A Perrotta, J Pilz, R Resel, O Werzer, AM Coclite Crystals 10 (4), 291, 2020 | 9 | 2020 |
| Universal software for the real-time control of sequential processing techniques J Pilz, M Tazreiter, AM Coclite Journal of Vacuum Science & Technology A 37 (6), 2019 | 6 | 2019 |
| AlYN thin films with high Y content: Microstructure and performance D Solonenko, J Strube, J Fammels, E Fisslthaler, V Röbisch, K Howell, ... physica status solidi (RRL)–Rapid Research Letters 17 (10), 2300193, 2023 | 5 | 2023 |
| Atomic Layer Deposition of TiN in Horizontal Vias Using Hydrazine as Nitrogen Precursor J Fammels, PC Lee, D Pal, J Pilz, D Solonenko, J Spiegelman, ... 2024 IEEE International Interconnect Technology Conference (IITC), 1-3, 2024 | | 2024 |
| Atomic Layer Deposition of Titanium Nitride in Horizontal Vias Using Hydrazine as Nitrogen Precursor J Fammels, J Pilz, D Solonenko IEEE Semiconductor Interface Specialists Conference, 2023 | | 2023 |
| Engineering Light with Mid-Infrared Metasurfaces for Sensing and Imaging Applications TD Dao, N Andrianov, M Chouiki, AS Munir, J Spettel, F Dubois, C Fleury, ... Optical Sensors, STu5C. 4, 2023 | | 2023 |
| Low-density SiOC thin films grown by low temperature plasma-enhanced chemical vapor deposition for high performance acoustic Bragg mirrors J Pilz, N Andrianov, T Sinani, SM Azeem, TD Dao, M Moridi, G Bruckner AVS 68th International Symposium, 2022 | | 2022 |
| Strong correlation of the piezoelectric response and microstructure in AlYN solid solutions D Solonenko, J Strube, J Fammels, V Röbisch, K Howell, X Zhao, J Pilz, ... | | 2022 |
| Highly textured AlN and Al0. 7Sc0. 3N piezoelectric thin films with Hf (0002) seed layer S Risquez, J Pilz, V Röbisch, GNT Jolly, K Howell, A Mazzalai, B Heinz, ... | | 2022 |
| Wide-spectral range DUV–MIR spectroscopic ellipsometry study of PECVD-grown silicon oxide and nitride thinfims: Wide-spectral range DUV–MIR spectroscopic ellipsometry study of … SM Azeem, J Spettel, A Nikolai, J Streque, T Cassese, J Pilz, ... The 9th International Conference on Spectroscopic Ellipsometry (ICSE), 2022 | | 2022 |
| Piezoelectricity of zinc oxide thin films deposited by plasma enhanced atomic layer deposition TA Ali, J Pilz, P Schäffner, B Stadlober, AM Coclite | | 2020 |
| Piezoelectric Response of ZnO Thin Films Grown By Plasma-Enhanced Atomic Layer Deposition J Pilz, T Abu Ali, P Schäffner, B Stadlober, AM Coclite Electrochemical Society Meeting Abstracts 236, 1128-1128, 2019 | | 2019 |
| Study of the properties of Al: ZnO thin films grown by plasma-enhanced atomic layer deposition J Pilz 24th International Symposium on Plasma Chemistry, 2019 | | 2019 |
