| Method of fabricating suspended microstructures D Horsley US Patent 6,465,355, 2002 | 266 | 2002 |
| Mapping protein collapse with single-molecule fluorescence and kinetic synchrotron radiation circular dichroism spectroscopy A Hoffmann, A Kane, D Nettels, DE Hertzog, P Baumgärtel, J Lengefeld, ... Proceedings of the National Academy of Sciences 104 (1), 105-110, 2007 | 254 | 2007 |
| Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics Y Lu, H Tang, S Fung, Q Wang, JM Tsai, M Daneman, BE Boser, ... Applied Physics Letters 106 (26), 2015 | 253 | 2015 |
| In-air rangefinding with an AlN piezoelectric micromachined ultrasound transducer RJ Przybyla, SE Shelton, A Guedes, II Izyumin, MH Kline, DA Horsley, ... IEEE Sensors Journal 11 (11), 2690-2697, 2011 | 223 | 2011 |
| Modeling, fabrication, and characterization of piezoelectric micromachined ultrasonic transducer arrays based on cavity SOI wafers Y Lu, DA Horsley Journal of Microelectromechanical Systems 24 (4), 1142-1149, 2015 | 188 | 2015 |
| Design, fabrication, and characterization of scandium aluminum nitride-based piezoelectric micromachined ultrasonic transducers Q Wang, Y Lu, S Mishin, Y Oshmyansky, DA Horsley Journal of microelectromechanical systems 26 (5), 1132-1139, 2017 | 178 | 2017 |
| 3D ultrasonic rangefinder on a chip RJ Przybyla, HY Tang, A Guedes, SE Shelton, DA Horsley, BE Boser IEEE Journal of Solid-State Circuits 50 (1), 320-334, 2014 | 161 | 2014 |
| Monolithic ultrasound fingerprint sensor X Jiang, Y Lu, HY Tang, JM Tsai, EJ Ng, MJ Daneman, BE Boser, ... Microsystems & nanoengineering 3 (1), 1-8, 2017 | 159 | 2017 |
| 3-D ultrasonic fingerprint sensor-on-a-chip HY Tang, Y Lu, X Jiang, EJ Ng, JM Tsai, DA Horsley, BE Boser IEEE Journal of Solid-State Circuits 51 (11), 2522-2533, 2016 | 158 | 2016 |
| Ultrasonic fingerprint sensor with transmit beamforming based on a PMUT array bonded to CMOS circuitry X Jiang, HY Tang, Y Lu, EJ Ng, JM Tsai, BE Boser, DA Horsley IEEE transactions on ultrasonics, ferroelectrics, and frequency control 64 …, 2017 | 157 | 2017 |
| CMOS-compatible AlN piezoelectric micromachined ultrasonic transducers S Shelton, ML Chan, H Park, D Horsley, B Boser, I Izyumin, R Przybyla, ... 2009 IEEE International Ultrasonics Symposium, 402-405, 2009 | 154 | 2009 |
| Batch transfer of microstructures using flip-chip solder bonding A Singh, DA Horsley, MB Cohn, AP Pisano, RT Howe Journal of Microelectromechanical Systems 8 (1), 27-33, 1999 | 154 | 1999 |
| Three-axis Lorentz-force magnetic sensor for electronic compass applications M Li, VT Rouf, MJ Thompson, DA Horsley Journal of Microelectromechanical Systems 21 (4), 1002-1010, 2012 | 146 | 2012 |
| Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope SH Nitzan, V Zega, M Li, CH Ahn, A Corigliano, TW Kenny, DA Horsley Scientific reports 5 (1), 9036, 2015 | 140 | 2015 |
| A high fill-factor annular array of high frequency piezoelectric micromachined ultrasonic transducers Y Lu, A Heidari, DA Horsley Journal of Microelectromechanical Systems 24 (4), 904-913, 2014 | 128 | 2014 |
| 12.1 3D ultrasonic gesture recognition RJ Przybyla, HY Tang, SE Shelton, DA Horsley, BE Boser 2014 IEEE International Solid-State Circuits Conference Digest of Technical …, 2014 | 127 | 2014 |
| Precision positioning using a microfabricated electrostatic actuator DA Horsley, N Wongkomet, R Horowitz, AP Pisano IEEE Transactions on Magnetics 35 (2), 993-999, 1999 | 123 | 1999 |
| Pulse-echo ultrasound imaging using an AlN piezoelectric micromachined ultrasonic transducer array with transmit beam-forming Y Lu, HY Tang, S Fung, BE Boser, DA Horsley Journal of Microelectromechanical Systems 25 (1), 179-187, 2015 | 119 | 2015 |
| Epitaxially-encapsulated polysilicon disk resonator gyroscope S Nitzan, CH Ahn, TH Su, M Li, EJ Ng, S Wang, ZM Yang, G O'brien, ... 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems …, 2013 | 103 | 2013 |
| Optical phased array using high contrast gratings for two dimensional beamforming and beamsteering BW Yoo, M Megens, T Chan, T Sun, W Yang, CJ Chang-Hasnain, ... Optics express 21 (10), 12238-12248, 2013 | 98 | 2013 |
