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Zhaoyu Chen
Zhaoyu Chen
Preverjeni e-poštni naslov na hust.edu.cn
Naslov
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Leto
The effects of match circuit on the breakdown process of capacitively coupled plasma driven by radio frequency
H Wu, Z Chen, S Yu, Q Wang, X Li, W Jiang, Y Zhang
Journal of Applied Physics 131 (15), 2022
132022
Note on the energy transport in capacitively coupled plasmas
H Wu, Z Chen, L Yi, W Jiang, Y Zhang
Plasma Sources Science and Technology 31 (4), 047001, 2022
72022
On the breakdown process of capacitively coupled plasma in carbon tetrafluoride
H Wu, Z Chen, Z Wang, B Rao, W Jiang, Y Zhang
Journal of Physics D: Applied Physics 55 (25), 255203, 2022
32022
Stochastic weighted particle control for electrostatic particle-in-cell Monte Carlo collision simulations in an axisymmetric coordinate system
Z Chen, Z Chen, Y Wang, J Xu, Z Chen, W Jiang, H Wang, Y Zhang
Computer Physics Communications 306, 109390, 2025
12025
Influence of external circuitry on CF4 breakdown process in capacitively coupled plasma
Z Chen, J Xu, H Wang, H Wu, W Jiang, Y Zhang
Journal of Vacuum Science & Technology B 41 (5), 2023
12023
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