The effects of match circuit on the breakdown process of capacitively coupled plasma driven by radio frequency H Wu, Z Chen, S Yu, Q Wang, X Li, W Jiang, Y Zhang Journal of Applied Physics 131 (15), 2022 | 13 | 2022 |
Note on the energy transport in capacitively coupled plasmas H Wu, Z Chen, L Yi, W Jiang, Y Zhang Plasma Sources Science and Technology 31 (4), 047001, 2022 | 7 | 2022 |
On the breakdown process of capacitively coupled plasma in carbon tetrafluoride H Wu, Z Chen, Z Wang, B Rao, W Jiang, Y Zhang Journal of Physics D: Applied Physics 55 (25), 255203, 2022 | 3 | 2022 |
Stochastic weighted particle control for electrostatic particle-in-cell Monte Carlo collision simulations in an axisymmetric coordinate system Z Chen, Z Chen, Y Wang, J Xu, Z Chen, W Jiang, H Wang, Y Zhang Computer Physics Communications 306, 109390, 2025 | 1 | 2025 |
Influence of external circuitry on CF4 breakdown process in capacitively coupled plasma Z Chen, J Xu, H Wang, H Wu, W Jiang, Y Zhang Journal of Vacuum Science & Technology B 41 (5), 2023 | 1 | 2023 |