ติดตาม
Toshiyuki Tsuchiya
Toshiyuki Tsuchiya
京都大学
ยืนยันอีเมลแล้วที่ me.kyoto-u.ac.jp - หน้าแรก
ชื่อ
อ้างโดย
อ้างโดย
ปี
Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films
T Tsuchiya, O Tabata, J Sakata, Y Taga
Journal of Microelectromechanical Systems 7 (1), 106-113, 1998
5581998
A z-axis differential capacitive SOI accelerometer with vertical comb electrodes
T Tsuchiya, H Funabashi
Sensors and Actuators A: Physical 116 (3), 378-383, 2004
1092004
Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro
K Kamei, Y Kato, Y Hirai, S Ito, J Satoh, A Oka, T Tsuchiya, Y Chen, ...
RSC advances 7 (58), 36777-36786, 2017
1022017
Tensile testing of insulating thin films; humidity effect on tensile strength of SiO2 films
T Tsuchiya, A Inoue, J Sakata
Sensors and Actuators A: Physical 82 (1-3), 286-290, 2000
1022000
Moving mask UV lithography for three-dimensional structuring
Y Hirai, Y Inamoto, K Sugano, T Tsuchiya, O Tabata
Journal of Micromechanics and Microengineering 17 (2), 199, 2006
992006
Reliability of MEMS: testing of materials and devices
O Brand, GK Fedder, C Hierold, JG Korvink
John Wiley & Sons, 2008
982008
Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films
T Tsuchiya, M Hirata, N Chiba, R Udo, Y Yoshitomi, T Ando, K Sato, ...
Journal of microelectromechanical systems 14 (5), 1178-1186, 2005
942005
Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films
T Tsuchiya, M Hirata, N Chiba
Thin Solid Films 484 (1-2), 245-250, 2005
942005
Polysilicon vibrating gyroscope vacuum-encapsulated in an on-chip micro chamber
T Tsuchiya, Y Kageyama, H Funabashi, J Sakata
Sensors and Actuators A: Physical 90 (1-2), 49-55, 2001
762001
Noise-induced chaos in the electrostatically actuated MEMS resonators
WM Zhang, O Tabata, T Tsuchiya, G Meng
Physics Letters A 375 (32), 2903-2910, 2011
712011
Mixing speed-controlled gold nanoparticle synthesis with pulsed mixing microfluidic system
K Sugano, Y Uchida, O Ichihashi, H Yamada, T Tsuchiya, O Tabata
Microfluidics and nanofluidics 9, 1165-1174, 2010
642010
Tensile testing of polycrystalline silicon thin films using electrostatic force grip
T Tsuchiya, O Tabata, J Sakata, Y Taga
IEEJ Transactions on Sensors and Micromachines 116 (10), 441-446, 1996
621996
Tensile strength and fracture toughness of surface micromachined polycrystalline silicon thin films prepared under various conditions
T Tsuchiya, J Sakata, Y Taga
MRS Online Proceedings Library (OPL) 505, 285, 1997
591997
Improved designs for an electrothermal in-plane microactuator
AMH Kwan, S Song, X Lu, L Lu, YK Teh, YF Teh, EWC Chong, Y Gao, ...
Journal of Microelectromechanical Systems 21 (3), 586-595, 2012
582012
Cross comparison of direct strength testing techniques on polysilicon films
DA LaVan, T Tsuchiya, G Coles, WG Knauss, I Chasiotis, D Read
Mechanical Properties of Structural Films, 2001
482001
Integrated-gut-liver-on-a-chip platform as an in vitro human model of non-alcoholic fatty liver disease
J Yang, Y Hirai, K Iida, S Ito, M Trumm, S Terada, R Sakai, T Tsuchiya, ...
Communications Biology 6 (1), 310, 2023
472023
Fatigue test of single crystal silicon resonator
T Tsuchiya
Tech. Digests of 16th Sensor Symp. 277, 1998
441998
Tensile testing of silicon thin films
T Tsuchiya
Fatigue & fracture of engineering materials & structures 28 (8), 665-674, 2005
432005
Tensile and tensile-mode fatigue testing of microscale specimens in constant humidity environment
T Tsuchiya, Y Yamaji, K Sugano, O Tabata
Experimental Mechanics 50, 509-516, 2010
392010
High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens
T Ikehara, T Tsuchiya
Journal of micromechanics and microengineering 18 (7), 075004, 2008
392008
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บทความ 1–20