The role of van der Waals forces in adhesion of micromachined surfaces FW DelRio, MP De Boer, JA Knapp, E David Reedy Jr, PJ Clews, ... Nature materials 4 (8), 629-634, 2005 | 607 | 2005 |
Accurate method for determining adhesion of cantilever beams MP De Boer, TA Michalske Journal of applied physics 86 (2), 817-827, 1999 | 320 | 1999 |
IC-compatible polysilicon surface micromachining JJ Sniegowski, MP De Boer Annual Review of Materials Science 30 (1), 299-333, 2000 | 310 | 2000 |
Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems TM Mayer, MP de Boer, ND Shinn, PJ Clews, TA Michalske Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000 | 253 | 2000 |
The impact of solution agglomeration on the deposition of self-assembled monolayers BC Bunker, RW CarPick, RA Assink, ML Thomas, MG Hankins, JA Voigt, ... Langmuir 16 (20), 7742-7751, 2000 | 234 | 2000 |
Tribology of MEMS MP De Boer, TM Mayer Mrs Bulletin 26 (4), 302-304, 2001 | 206 | 2001 |
Long working distance interference microscope MB Sinclair, MP Deboer, NF Smith US Patent 6,721,094, 2004 | 195 | 2004 |
High-performance surface-micromachined inchworm actuator MP de Boer, DL Luck, WR Ashurst, R Maboudian, AD Corwin, ... Journal of Microelectromechanical Systems 13 (1), 63-74, 2004 | 183 | 2004 |
Interferometry of actuated microcantilevers to determine material properties and test structure nonidealities in MEMS BD Jensen, MP de Boer, ND Masters, F Bitsie, DA LaVan Journal of Microelectromechanical Systems 10 (3), 336-346, 2001 | 165 | 2001 |
Crystalline polymer nanofibers with ultra-high strength and thermal conductivity R Shrestha, P Li, B Chatterjee, T Zheng, X Wu, Z Liu, T Luo, S Choi, ... Nature communications 9 (1), 1664, 2018 | 149 | 2018 |
Mechanics of microcantilever beams subject to combined electrostatic and adhesive forces JA Knapp, MP de Boer Journal of Microelectromechanical Systems 11 (6), 754-764, 2002 | 140 | 2002 |
Microwedge indentation of the thin film fine line—I. Mechanics MP De Boer, WW Gerberich Acta materialia 44 (8), 3169-3175, 1996 | 131 | 1996 |
A nanomechanical switch for integration with CMOS logic DA Czaplewski, GA Patrizi, GM Kraus, JR Wendt, CD Nordquist, ... Journal of Micromechanics and Microengineering 19 (8), 085003, 2009 | 113 | 2009 |
Adhesion hysteresis of silane coated microcantilevers MP de Boer, JA Knapp, TA Michalske, U Srinivasan, R Maboudian Acta Materialia 48 (18-19), 4531-4541, 2000 | 112 | 2000 |
Role of interfacial properties on MEMS performance and reliability MP de Boer, JA Knapp, TM Mayer, TA Michalske Microsystems metrology and inspection 3825, 2-15, 1999 | 89 | 1999 |
Effect of adhesion on dynamic and static friction in surface micromachining AD Corwin, MP De Boer Applied Physics Letters 84 (13), 2451-2453, 2004 | 86 | 2004 |
Adhesion of polysilicon microbeams in controlled humidity ambients MP De Boer, PJ Clews, BK Smith, TA Michalske MRS Online Proceedings Library (OPL) 518, 131, 1998 | 79 | 1998 |
Microwedge indentation of the thin film fine line—II. Experiment MP De Boer, WW Gerberich Acta materialia 44 (8), 3177-3187, 1996 | 77 | 1996 |
Thermodynamics of capillary adhesion between rough surfaces MP De Boer, PCT De Boer Journal of colloid and interface science 311 (1), 171-185, 2007 | 76 | 2007 |
Rough surface adhesion in the presence of capillary condensation FW DelRio, ML Dunn, LM Phinney, CJ Bourdon, MP De Boer Applied physics letters 90 (16), 2007 | 76 | 2007 |