Theo dõi
Paul Muralt
Paul Muralt
Professor in Materials Science, EPFL, Lausanne, Switzerland
Email được xác minh tại epfl.ch - Trang chủ
Tiêu đề
Trích dẫn bởi
Trích dẫn bởi
Năm
Thin film piezoelectrics for MEMS
S Trolier-McKinstry, P Muralt
Journal of Electroceramics 12, 7-17, 2004
12852004
Ferroelectric thin films for micro-sensors and actuators: areview
P Muralt
Journal of micromechanics and microengineering 10 (2), 136, 2000
11442000
Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications
MA Dubois, P Muralt
Applied Physics Letters 74 (20), 3032-3034, 1999
5911999
PZT thin films for microsensors and actuators: Where do we stand?
P Muralt
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 47 …, 2002
4652002
Recent progress in materials issues for piezoelectric MEMS
P Muralt
Journal of the American Ceramic Society 91 (5), 1385-1396, 2008
4242008
Piezoelectric thin films for sensors, actuators, and energy harvesting
P Muralt, RG Polcawich, S Trolier-McKinstry
MRS bulletin 34 (9), 658-664, 2009
4072009
Micromachined infrared detectors based on pyroelectric thin films
P Muralt
Reports on progress in physics 64 (10), 1339, 2001
4072001
Piezoelectric micromachined ultrasonic transducers based on PZT thin films
P Muralt, N Ledermann, J Paborowski, A Barzegar, S Gentil, B Belgacem, ...
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 52 …, 2005
3912005
Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering
MA Dubois, P Muralt
Journal of Applied Physics 89 (11), 6389-6395, 2001
3782001
Thickness dependence of the properties of highly c-axis textured AlN thin films
F Martin, P Muralt, MA Dubois, A Pezous
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 22 (2 …, 2004
3682004
Measurement of the effective transverse piezoelectric coefficient e31, f of AlN and Pb (Zrx, Ti1− x) O3 thin films
MA Dubois, P Muralt
Sensors and Actuators A: Physical 77 (2), 106-112, 1999
3421999
Textured, piezoelectric Pb (Zrx, Ti1-x) O3 thin films for MEMS: integration, deposition and properties
N Ledermann, P Muralt, J Baborowski, S Gentil, K Mukati, M Cantoni, ...
Sensors and Actuators A 105, 162-170, 2003
3342003
Texture control of and thin films with seeding
P Muralt, T Maeder, L Sagalowicz, S Hiboux, S Scalese, D Naumovic, ...
Journal of Applied Physics 83 (7), 3835-3841, 1998
3311998
Scanning tunneling potentiometry
P Muralt, DW Pohl
Applied Physics Letters 48 (8), 514-516, 1986
3101986
Size-effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature-size
S Bühlmann, B Dwir, J Baborowski, P Muralt
Integrated Ferroelectrics 50 (1), 261-267, 2002
2992002
A micro-solid oxide fuel cell system as battery replacement
A Bieberle-Hütter, D Beckel, A Infortuna, UP Muecke, JLM Rupp, ...
Journal of Power Sources 177 (1), 123-130, 2008
2672008
Piezoelectric aluminum nitride thin films for microelectromechanical systems
G Piazza, V Felmetsger, P Muralt, RH Olsson III, R Ruby
MRS bulletin 37 (11), 1051-1061, 2012
2572012
Fabrication and characterization of PZT thin-film vibrators for micromotors
P Muralt, M Kohli, T Maeder, A Kholkin, K Brooks, N Setter, R Luthier
Sensors and Actuators A: Physical 48 (2), 157-165, 1995
2481995
Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions
P Muralt, A Kholkin, M Kohli, T Maeder
Sensors and Actuators A: Physical 53 (1-3), 398-404, 1996
2461996
Piezoelectric thin films for MEMS
P Muralt
Integrated Ferroelectrics 17 (1-4), 297-307, 1997
2361997
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