A very low loss 220–325 GHz silicon micromachined waveguide technology B Beuerle, J Campion, U Shah, J Oberhammer
IEEE Transactions on Terahertz science and technology 8 (2), 248-250, 2018
104 2018 a 500–750 ghz rf mems waveguide switch U Shah, T Reck, H Frid, C Jung-Kubiak, G Chattopadhyay, I Mehdi, ...
IEEE Transactions on Terahertz Science and Technology 7 (3), 326-334, 2017
72 2017 Submillimeter-wave 3.3-bit RF MEMS phase shifter integrated in micromachined waveguide U Shah, E Decrossas, C Jung-Kubiak, T Reck, G Chattopadhyay, I Mehdi, ...
IEEE Transactions on Terahertz Science and Technology 6 (5), 706-715, 2016
67 2016 Micromachined Filters at 450 GHz With 1% Fractional Bandwidth and Unloaded Q Beyond 700 O Glubokov, X Zhao, J Campion, U Shah, J Oberhammer
IEEE Transactions on Terahertz Science and Technology 9 (1), 106-108, 2018
56 2018 Compact silicon-micromachined wideband 220–330-GHz turnstile orthomode transducer A Gomez-Torrent, U Shah, J Oberhammer
IEEE Transactions on Terahertz Science and Technology 9 (1), 38-46, 2018
54 2018 High-aspect-ratio through silicon vias for high-frequency application fabricated by magnetic assembly of gold-coated nickel wires SJ Bleiker, AC Fischer, U Shah, N Somjit, T Haraldsson, N Roxhed, ...
IEEE Transactions on components, packaging and Manufacturing technology 5 (1 …, 2014
53 2014 Silicon micromachined D-band diplexer using releasable filling structure technique X Zhao, O Glubokov, J Campion, A Gomez-Torrent, A Krivovitca, U Shah, ...
IEEE Transactions on Microwave Theory and Techniques 68 (8), 3448-3460, 2020
51 2020 Micromachined multilayer bandpass filter at 270 GHz using dual-mode circular cavities O Glubokov, X Zhao, B Beuerle, J Campion, U Shah, J Oberhammer
2017 IEEE MTT-S International Microwave Symposium (IMS), 1449-1452, 2017
49 2017 Toward industrial exploitation of THz frequencies: Integration of SiGe MMICs in silicon-micromachined waveguide systems J Campion, A Hassona, ZS He, B Beuerle, A Gomez-Torrent, U Shah, ...
IEEE Transactions on Terahertz Science and Technology 9 (6), 624-636, 2019
48 2019 Investigation of Fabrication Accuracy and Repeatability of High- O Glubokov, X Zhao, J Campion, B Beuerle, U Shah, J Oberhammer
IEEE Transactions on Microwave Theory and Techniques 67 (9), 3696-3706, 2019
46 2019 Low-loss, high-linearity RF interposers enabled by through glass vias U Shah, J Liljeholm, J Campion, T Ebefors, J Oberhammer
IEEE Microwave and Wireless Components Letters 28 (11), 960-962, 2018
40 2018 An ultra low-loss silicon-micromachined waveguide filter for D-band telecommunication applications J Campion, O Glubokov, A Gomez, A Krivovitca, U Shah, L Bolander, Y Li, ...
2018 IEEE/MTT-S International Microwave Symposium-IMS, 583-586, 2018
35 2018 High-directivity MEMS-tunable directional couplers for 10–18-GHz broadband applications U Shah, M Sterner, J Oberhammer
IEEE transactions on microwave theory and techniques 61 (9), 3236-3246, 2013
33 2013 Micromachined subterahertz waveguide-integrated phase shifter utilizing supermode propagation X Zhao, U Shah, O Glubokov, J Oberhammer
IEEE Transactions on Microwave Theory and Techniques 69 (7), 3219-3227, 2021
32 2021 Elliptical alignment holes enabling accurate direct assembly of micro-chips to standard waveguide flanges at sub-THz frequencies J Campion, U Shah, J Oberhammer
2017 IEEE MTT-S International Microwave Symposium (IMS), 1262-1265, 2017
31 2017 Microwave MEMS devices designed for process robustness and operational reliability M Sterner, N Somjit, U Shah, S Dudorov, D Chicherin, A Räisänen, ...
International Journal of Microwave and Wireless Technologies 3 (5), 547-563, 2011
26 2011 A 230–300 GHz low-loss micromachined waveguide hybrid coupler J Svedin, R Malmqvist, B Beuerle, U Shah, J Oberhammer
2017 47th European microwave conference (EuMC), 616-619, 2017
23 2017 Micromachined silicon-core substrate-integrated waveguides at 220–330 GHz A Krivovitca, U Shah, O Glubokov, J Oberhammer
IEEE Transactions on Microwave Theory and Techniques 68 (12), 5123-5131, 2020
18 2020 A 220–325 GHz low-loss micromachined waveguide power divider R Malmqvist, A Gustafsson, J Svedin, B Beuerle, U Shah, J Oberhammer
2017 IEEE Asia Pacific Microwave Conference (APMC), 291-294, 2017
18 2017 MEMS reconfigurable millimeter-wave surface for V-band rectangular-waveguide switch Z Baghchehsaraei, U Shah, J Åberg, G Stemme, J Oberhammer
International Journal of Microwave and Wireless Technologies 5 (3), 341-349, 2013
16 2013 
Joachim OberhammerKTH Royal Institute of TechnologyEmail được xác minh tại ee.kth.se
