| Vapor phase deposition system G Benvenuti, EH Wagner, C Petit US Patent App. 13/123,225, 2011 | 306 | 2011 |
| Light induced chemical vapour deposition of titanium oxide thin films at room temperature E Halary, G Benvenuti, F Wagner, P Hoffmann Applied Surface Science 154, 146-151, 2000 | 55 | 2000 |
| Crystallinity of titania thin films deposited by light induced chemical vapor deposition E Halary, E Haro-Poniatowski, G Benvenuti, P Hoffmann Applied surface science 168 (1-4), 61-65, 2000 | 37 | 2000 |
| High uniformity deposition with chemical beams in high vacuum G Benvenuti, E Halary-Wagner, A Brioude, P Hoffmann Thin Solid Films 427 (1-2), 411-416, 2003 | 31 | 2003 |
| Geometry of chemical beam vapor deposition system for efficient combinatorial investigations of thin oxide films: deposited film properties versus precursor flow simulations E Wagner, CS Sandu, S Harada, C Pellodi, M Jobin, P Muralt, ... ACS Combinatorial science 18 (3), 154-161, 2016 | 23 | 2016 |
| Combinatorial high-vacuum chemical vapor deposition of textured hafnium-doped lithium niobate thin films on sapphire A Dabirian, Y Kuzminykh, SC Sandu, S Harada, E Wagner, P Brodard, ... Crystal growth & design 11 (1), 203-209, 2011 | 19 | 2011 |
| Combinatorial chemical beam epitaxy of lithium niobate thin films on sapphire A Dabirian, S Harada, Y Kuzminykh, SC Sandu, E Wagner, G Benvenuti, ... Journal of The Electrochemical Society 158 (2), D72, 2010 | 19 | 2010 |
| Chemical beam vapour deposition technique with Sybilla equipment: Review of main results in its 20-year anniversary E Wagner, W Maudez, S Bagdzevicius, CS Sandu, G Benvenuti Oxide-based Materials and Devices XII 11687, 135-154, 2021 | 17 | 2021 |
| Combinatorial discovery and optimization of amorphous HfO2–Nb2O5 mixture with improved transparency A Dabirian, Y Kuzminykh, B Afra, S Harada, E Wagner, CS Sandu, ... Electrochemical and Solid-State Letters 13 (7), G60, 2010 | 17 | 2010 |
| Fabrication of complex oxide microstructures by combinatorial chemical beam vapour deposition through stencil masks E Wagner, CS Sandu, S Harada, G Benvenuti, V Savu, P Muralt Thin Solid Films 586, 64-69, 2015 | 16 | 2015 |
| Phase transitions in thin titanium oxide films under the action of excimer laser radiation P Mitrev, G Benvenuti, P Hofman, A Smirnov, N Kaliteevskaya, R Seisyan Technical physics letters 31, 908-911, 2005 | 16 | 2005 |
| Chemical vapor deposition kinetics and localized growth regimes in combinatorial experiments A Dabirian, Y Kuzminykh, E Wagner, G Benvenuti, SA Rushworth, ... ChemPhysChem 12 (18), 3524, 2011 | 14 | 2011 |
| Chemical beam deposition of titanium dioxide thin films G Benvenuti Verlag nicht ermittelbar, 2003 | 13 | 2003 |
| Amorphous silicon-doped titania films for on-chip photonics T Kornher, K Xia, R Kolesov, B Villa, S Lasse, CS Sandu, E Wagner, ... ACS Photonics 4 (5), 1101-1107, 2017 | 10 | 2017 |
| A combinatorial chemical beam vapour deposition approach to tune the electrical conductivity of Nb: TiO2 films via Si co-doping CS Sandu, E Wagner, S Harada, G Benvenuti, W Maudez, M Jobin, ... Thin Solid Films 615, 265-270, 2016 | 9 | 2016 |
| Evaluation of niobium dimethylamino-ethoxide for chemical vapour deposition of niobium oxide thin films A Dabirian, Y Kuzminykh, E Wagner, G Benvenuti, S Rushworth, ... Thin Solid Films 571, 94-101, 2014 | 8 | 2014 |
| Efficient Optimization of High‐Quality Epitaxial Lithium Niobate Thin Films by Chemical Beam Vapor Deposition: Impact of Cationic Stoichiometry AL Pellegrino, E Wagner, F Lo Presti, W Maudez, S Kolb, R Rani, ... Advanced Materials Interfaces 10 (34), 2300535, 2023 | 7 | 2023 |
| Study of titanium amino-alkoxide derivatives as TiO2 Chemical Beam Vapour Deposition precursor D Bijou, E Wagner, W Maudez, T Cornier, M Yettou, G Benvenuti, ... Materials Chemistry and Physics 277, 125561, 2022 | 7 | 2022 |
| Full wafer metrology for chemically graded thin films M Jobin, S Jotterand, C Pellodi, S dos Santos, CS Sandu, E Wagner, ... Optical Micro-and Nanometrology IV 8430, 52-62, 2012 | 7 | 2012 |
| Selective area deposition of titanium dioxide thin films by light induced chemical vapour deposition E Halary-Wagner, P Lambelet, G Benvenuti, P Hoffmann Le Journal de Physique IV 11 (PR3), Pr3-825-Pr3-832, 2001 | 7 | 2001 |
