Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …

In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as
an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the …

Flexible electronics such as tactile cognitive sensors have been broadly adopted in soft
robotic manipulators to enable human-skin-mimetic perception. To achieve appropriate …

Many applications of ultrasound for sensing, actuation and imaging require miniaturized and
low power transducers and transducer arrays integrated with electronic systems …

The objective of this article is to review the recent advancement in piezoelectric
micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric …

Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

Piezoelectric thin films offer a number of advantages in various applications, such as high
energy density harvesters, a wide dynamic range, and high sensitivity sensors, as well as …

Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer
integrated actuation, sensing, and transduction. The broad implementation of such active …

Over the past two decades, several advances have been made in micromachined sensors
and actuators. As the field of microelectromechanical systems (MEMS) has advanced, a …

Ultrasonic ranging has been widely used in automobiles, unmanned aerial vehicles (UAVs),
robots and other fields. With the appearance of micromachined ultrasonic transducers …