Over the last few years the efforts devoted to the research on low-temperature processing of
metal oxide thin films have increased notably. This has enabled the direct integration of …

▪ Abstract Piezoelectric materials have been integrated with silicon microelectromechanical
systems (MEMS) in both microsensor and microactuator applications. Thin-film materials …

The use of chemical solution deposition for the fabrication of perovskite thin films is
reviewed. A variety of approaches including sol− gel, chelate, and metalloorganic …

The chemical solution deposition (CSD) technique as a highly flexible method for the
fabrication of electronic oxide thin films is reviewed. Various chemical aspects of different …

Extracting energy from low vibration frequencies (< 10 Hz) using piezoelectric energy
harvester promises continuous self‐powering for sensors and wearables. The piezoelectric …

Thin film growth by a non-vacuum deposition technique, namely, the chemical solution
deposition (CSD) method, is reviewed with emphasis on the growth of various oxide films …

Columnar and highly oriented (100) BaTiO3 and SrTiO3 thin films were prepared by a
chelate‐type chemical solution deposition (CSD) process by manipulation of film deposition …

New advances in the sol–gel processing of ferroelectric ceramic powders and thin films and
recently, scientific and technological interests in ferroelectric ceramics have been focused …

Capacitor technologies are as varied as the applications that they enable, but one of the
common themes in advanced capacitors for consumer electronics is a desire for increased …

Thin films of BaTiO3 and SrTiO3 were prepared by a chemical solution deposition method.
The impact of the precursor on the processing, on the microstructure, and on the dielectric …