Dramatic Reduction of Silicon Surface Recombination by ALD TiOx Cap** Layer from TiCl4 and H2O: The Role of Chlorine
MM Shehata, DH Macdonald… - ACS Applied Materials & …, 2023 - ACS Publications
Amorphous thin-film TiO x prepared via atomic layer deposition (ALD) has been identified as
one of the most promising materials for use in transparent passivating contacts in high …
one of the most promising materials for use in transparent passivating contacts in high …
Engineering Silicon Interfaces with Transparent AlyTiOx/ZnO/TiO2 Stack Exhibiting Exceptional Passivating Contact Performance
Passivating contact technologies are essential for fabricating high‐efficiency crystalline
silicon (c‐Si) solar cells, and their application and incorporation into manufacturing lines has …
silicon (c‐Si) solar cells, and their application and incorporation into manufacturing lines has …
Process temperature-dependent interface quality and Maxwell–Wagner interfacial polarization in atomic layer deposited Al 2 O 3/TiO 2 nanolaminates for energy …
Considering the excellent tunability of electrical and dielectric properties in binary metal
oxide based multi-layered nanolaminate structures, a thermal atomic layer deposition …
oxide based multi-layered nanolaminate structures, a thermal atomic layer deposition …
Tailoring crystallisation of anatase TiO2 ultra-thin films grown by atomic layer deposition using 2D oxides as growth template
TiO 2 ultrathin films are required in many material research areas. The anatase phase was
found to be more stable in case of atomic layer deposition growth, nevertheless a critical …
found to be more stable in case of atomic layer deposition growth, nevertheless a critical …
Atomic Layer Deposited TiO2 and Al2O3 Thin Films as Coatings for Aluminum Food Packaging Application
Titanium dioxide (TiO2) and aluminum oxide (Al2O3) coatings have been investigated in a
wide range of bio-applications due to their biodegradation and biocompatibility properties …
wide range of bio-applications due to their biodegradation and biocompatibility properties …
TiO2 coatings via atomic layer deposition on polyurethane and polydimethylsiloxane substrates: Properties and effects on C. albicans growth and inactivation process
Atomic layer deposition (ALD) surges as an attractive technology to deposit thin films on
different substrates for many advanced biomedical applications. Herein titanium dioxide (TiO …
different substrates for many advanced biomedical applications. Herein titanium dioxide (TiO …
Correlation of interfacial and dielectric characteristics in atomic layer deposited Al2O3/TiO2 nanolaminates grown with different precursor purge times
Considering the potential applications of Al 2 O 3/TiO 2 nanolaminates (ATA NLs) in storage
capacitors, device-grade ATA NLs are fabricated using an ALD system, wherein the effect of …
capacitors, device-grade ATA NLs are fabricated using an ALD system, wherein the effect of …
Composition-sensitive growth kinetics and dispersive optical properties of thin HfxTi1−xO2 (0 ≤ x ≤ 1) films prepared by the ALD method
VV Atuchin, MS Lebedev, IV Korolkov… - Journal of Materials …, 2019 - Springer
The optical quality Hf x Ti 1− x O 2 films with a wide range of the Hf/Ti ratio were prepared on
Si (100) substrates by the ALD method with the use of tetrakis (ethylmethylamido) hafnium …
Si (100) substrates by the ALD method with the use of tetrakis (ethylmethylamido) hafnium …
Atomic layer deposition of TiO2 and Al2O3 thin films for the electrochemical study of corrosion protection in aluminum alloy cans used in beverage
Titanium dioxide (TiO 2) and aluminum oxide (Al 2 O 3) thin films, with thicknesses around
100 nm, were grown on commercial pure-and resin-coated Al substrates using the atomic …
100 nm, were grown on commercial pure-and resin-coated Al substrates using the atomic …
Influence of the Al2O3 partial-monolayer number on the crystallization mechanism of TiO2 in ALD TiO2/Al2O3 nanolaminates and its impact on the material properties
Abstract TiO 2/Al 2 O 3 nanolaminates are being investigated to obtain unique materials with
chemical, physical, optical, electrical and mechanical properties for a broad range of …
chemical, physical, optical, electrical and mechanical properties for a broad range of …