Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus,
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …

Electro-optical photonic integrated circuits (PICs) based on lithium niobate (LiNbO3) have
demonstrated the vast capabilities of materials with a high Pockels coefficient,. They enable …

With the in-depth advancement of the fifth generation (5G) mobile communication
technology, the technical requirements for filters are also constantly improving. Surface …

We present high-performance shear horizontal surface acoustic wave (SH-SAW) and
longitudinal leaky SAW (LL-SAW) devices using lithium tantalate (LiTaO3) thin films on …

This work presents an in-depth study of simulation and measurement results of laterally
excited shear bulk acoustic resonators (XBAR) in Lithium Niobate, at 5 GHz with high …

This work presents the study of suspended Y-cut Lithium Niobate shear bulk acoustic
resonators for wide band filter applications in the frequency range of 3.5-4.5 GHz. The …

In this work, Film Bulk Acoustic Resonators (FBAR) based on 250 nm-thick Y+ 163°-cut
LiNbO 3 films have been fabricated using a layer transfer process (4-inch) including …

The continuous growth of global data traffic over the past three decades, along with
advances in disaggregated computing architectures, presents significant challenges for …

Today's phones have as many as 60 front-end radios covering multiple frequency bands.
For each frequency band, acoustic filters offer high-Q, good power handling, and linearity in …

In this paper, Y+ 163°-cut LiNbO 3 (LNO) Film Bulk Acoustic Resonators (FBAR) with
patterned bottom electrodes (AlSi or W) and a sacrificial layer cavity have been fabricated …