[HTML][HTML] Perspectives on oblique angle deposition of thin films: From fundamentals to devices

A Barranco, A Borras, AR Gonzalez-Elipe… - Progress in Materials …, 2016 - Elsevier
The oblique angle configuration has emerged as an invaluable tool for the deposition of
nanostructured thin films. This review develops an up to date description of its principles …

Research progress in rare earth-doped perovskite manganite oxide nanostructures

W **a, Z Pei, K Leng, X Zhu - Nanoscale Research Letters, 2020 - Springer
Perovskite manganites exhibit a broad range of structural, electronic, and magnetic
properties, which are widely investigated since the discovery of the colossal …

Assembling the puzzle of superconducting elements: a review

C Buzea, K Robbie - Superconductor Science and Technology, 2004 - iopscience.iop.org
Superconductivity in the simple elements is of both technological relevance and
fundamental scientific interest in the investigation of superconductivity phenomena. Recent …

Thin-film growth dynamics with shadowing and re-emission effects

T Karabacak - Journal of Nanophotonics, 2011 - spiedigitallibrary.org
Growth dynamics of thin-films involves both shadowing and re-emission effects. Shadowing
can originate from obliquely incident atoms being preferentially deposited on hills of the …

Glancing angle deposition

MT Taschuk, MM Hawkeye, MJ Brett - Handbook of deposition technologies …, 2010 - Elsevier
Publisher Summary This chapter focuses on experimental aspects of the Glancing angle
deposition (GLAD) technique–its methods and possibilities. It introduces the basic theory …

Phase, grain structure, stress, and resistivity of sputter-deposited tungsten films

D Choi, B Wang, S Chung, X Liu, A Darbal… - Journal of Vacuum …, 2011 - pubs.aip.org
Sputter-deposited W films with nominal thicknesses between 5 and 180 nm were prepared
by varying the base pressure prior to film deposition and by including or not including …

[КНИГА][B] Sputtering materials for VLSI and thin film devices

J Sarkar - 2010 - books.google.com
An important resource for students, engineers and researchers working in the area of thin
film deposition using physical vapor deposition (eg sputtering) for semiconductor, liquid …

Glad Pt–Ni alloy nanorods for oxygen reduction reaction

NN Kariuki, WJ Khudhayer, T Karabacak… - Acs Catalysis, 2013 - ACS Publications
Vertically aligned platinum–nickel (Pt–Ni) alloy nanorod arrays were grown on glassy
carbon electrodes using a magnetron sputtering glancing angle deposition (GLAD) …

Nanostructured tungsten and tungsten trioxide films prepared by glancing angle deposition

D Deniz, DJ Frankel, RJ Lad - Thin Solid Films, 2010 - Elsevier
Nanostructured tungsten (W) and tungsten trioxide (WO3) films were prepared by glancing
angle deposition using pulsed direct current magnetron sputtering at room temperature with …

Enhanced step coverage by oblique angle physical vapor deposition

T Karabacak, TM Lu - Journal of applied physics, 2005 - pubs.aip.org
We present the use of an oblique angle physical vapor deposition (OAPVD) technique with
substrate rotation to obtain conformal thin films with enhanced step coverage on patterned …