Insulated gate and surface passivation structures for GaN-based power transistors

Z Yatabe, JT Asubar, T Hashizume - Journal of Physics D …, 2016 - iopscience.iop.org
Recent years have witnessed GaN-based devices delivering their promise of
unprecedented power and frequency levels and demonstrating their capability as an able …

[HTML][HTML] Controlling surface/interface states in GaN-based transistors: Surface model, insulated gate, and surface passivation

JT Asubar, Z Yatabe, D Gregusova… - Journal of Applied …, 2021 - pubs.aip.org
Gallium nitride (GaN) is one of the front-runner materials among the so-called wide bandgap
semiconductors that can provide devices having high breakdown voltages and are capable …

A Review of GaN Channel-Based MOSHEMTs for Next-Generation Medium/Low-Voltage Rating and High-Speed RF Power Applications

G Deshpande, S Bhattacharya, J Ajayan… - Journal of Electronic …, 2024 - Springer
This comprehensive review delves into the intricate realm of GaN-based metal–oxide–
semiconductor (MOS) high-electron-mobility transistors (HEMTs), providing an exhaustive …

AlGaN/GaN MIS-HEMTs of Very-Low Hysteresis and Current Collapse With In-Situ Pre-Deposition Plasma Nitridation and LPCVD-Si3N4 Gate Insulator

Z Zhang, W Li, K Fu, G Yu, X Zhang… - IEEE Electron …, 2016 - ieeexplore.ieee.org
In this letter, we report an in-situ predeposition plasma nitridation process, which is adopted
to remove the GaN surface oxygen-related bonds and reduce surface dangling bonds by …

Effect of nitrogen incorporation into Al-based gate insulators in AlON/AlGaN/GaN metal–oxide–semiconductor structures

R Asahara, M Nozaki, T Yamada, J Ito… - Applied Physics …, 2016 - iopscience.iop.org
The superior physical and electrical properties of aluminum oxynitride (AlON) gate
dielectrics on AlGaN/GaN substrates in terms of thermal stability, reliability, and interface …

Normally‐off AlGaN/GaN MOS‐HEMT using ultra‐thin Al0.45Ga0.55N barrier layer

A Chakroun, A Jaouad, M Bouchilaoun… - … status solidi (a), 2017 - Wiley Online Library
In this work, we report on the fabrication of a normally‐off AlGaN/GaN Metal–Oxide–
Semiconductor High Electron Mobility Transistor (MOS‐HEMT) using an ultra‐thin Al0 …

Improvement of electron transport property and on-resistance in normally-OFF Al₂O₃/AlGaN/GaN MOS-HEMTs using post-etch surface treatment

J Zhu, S **g, X Ma, S Liu, P Wang… - … on Electron Devices, 2020 - ieeexplore.ieee.org
Post-etch surface treatment technique was developed for normally-OFF recess-gate Al 2 O
3/AlGaN/GaN metal–oxide–semiconductor high-electron-mobility tran-sistors (MOS-HEMTs) …

AlGaN/GaN MOS-HEMT device fabricated using a high quality PECVD passivation process

A Chakroun, A Jaouad, A Soltani… - IEEE Electron …, 2017 - ieeexplore.ieee.org
In this letter, an AlGaN/GaN MOS-HEMT was demonstrated using a 5-nm-thick SiO x
dielectric layer deposited by plasma enhanced chemical vapor deposition (PECVD) as a …

[HTML][HTML] Impact of PECVD deposition on dielectric charge and passivation for n-GaN/SiOx interfaces

O Richard, A Soltani, R Adhiri, A Ahaitouf, H Maher… - Results in …, 2024 - Elsevier
Controlling properties of GaN/dielectric interfaces is crucial for determining the
characteristics of MOS-HEMT devices and their stability. Interface properties are largely …

Characterization of dynamic self-heating in GaN HEMTs using gate resistance measurement

A Cutivet, F Cozette, M Bouchilaoun… - IEEE Electron …, 2016 - ieeexplore.ieee.org
This letter reports on a new method for the characterization of transistors transient self-
heating based on gate end-to-end resistance measurement. An alternative power signal is …