CMOS‐technology‐enabled flexible and stretchable electronics for internet of everything applications

AM Hussain, MM Hussain - Advanced Materials, 2016 - Wiley Online Library
Flexible and stretchable electronics can dramatically enhance the application of electronics
for the emerging Internet of Everything applications where people, processes, data and …

Overview of recent direct wafer bonding advances and applications

H Moriceau, F Rieutord, F Fournel… - Advances in Natural …, 2010 - iopscience.iop.org
Direct wafer bonding processes are being increasingly used to achieve innovative stacking
structures. Many of them have already been implemented in industrial applications. This …

Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology

SK Selvaraja, W Bogaerts, P Dumon… - IEEE Journal of …, 2009 - ieeexplore.ieee.org
We report subnanometer linewidth uniformity in silicon nanophotonics devices fabricated
using high-volume CMOS fabrication tools. We use wavelength-selective devices such as …

Surface Roughness of Hydrogen Ion Cut Low Temperature Bonded Thin Film Layers

YA Li, RW Bower - Japanese Journal of Applied Physics, 2000 - iopscience.iop.org
We have observed that wafer splitting from hydrogen ion implantation into silicon after low
temperature direct bonding creates an expunged film with a surface roughness that is∼ 1 …

Smooth thin film layers produced by low temperature hydrogen ion cut

RW Bower - US Patent 7,094,667, 2006 - Google Patents
A method for producing wafer splitting from ion implantation into silicon after low
temperature direct bonding with surface roughness that is 1 nm (RMS). This result is an …

Ion beams in materials processing and analysis

B Schmidt, K Wetzig - 2012 - books.google.com
A comprehensive review of ion beam application in modern materials research is provided,
including the basics of ion beam physics and technology. The physics of ion-solid …

Germanium surface wet-etch-reconditioning for porous lift-off and substrate reuse

A Chapotot, B Ilahi, J Arias-Zapata, T Hanuš… - Materials Science in …, 2023 - Elsevier
Reducing both the cost and weight of Germanium (Ge)-based devices is a key concern in
extending these technologies to mainstream applications. In this framework, the porous Ge …

Formation of size-controlled silicon nanocrystals in plasma enhanced chemical vapor deposition grown SiOxNy/SiO2 superlattices

AM Hartel, D Hiller, S Gutsch, P Löper, S Estradé… - Thin Solid Films, 2011 - Elsevier
Size controlled silicon nanocrystals (SiNC) in silicon oxynitride matrix were prepared using
plasma enhanced chemical vapor deposition. The as-deposited superlattices (SLs) and the …

Three dimensional device integration method and integrated device

PM Enquist, GG Fountain Jr - US Patent 9,431,368, 2016 - Google Patents
Int. C. HOIL 2L/20(2006.01) HOIL 2L/683(2006.01) HOIL 2L/768(2006.01) HOIL
2/822(2006.01) HOIL 23/13(2006.01) HOIL 23/36(2006.01) HOIL 23/248(2006.01) HOIL …

Hydrogen blistering of silicon: Progress in fundamental understanding

B Terreault - Physica status solidi (a), 2007 - Wiley Online Library
When silicon is implanted with a sufficient concentration of H ions, at low to moderate
temperature, and subsequently annealed at high temperature, dome‐shaped gas‐filled …