[HTML][HTML] Review of MEMS based Fourier transform spectrometers

J Chai, K Zhang, Y Xue, W Liu, T Chen, Y Lu, G Zhao - Micromachines, 2020 - mdpi.com
Fourier transform spectrometers (FTS), mostly working in infrared (IR) or near infrared (NIR)
range, provide a variety of chemical or material analysis with high sensitivity and accuracy …

Waveguide‐integrated broadband spectrometer based on tailored disorder

W Hartmann, P Varytis, H Gehring… - Advanced Optical …, 2020 - Wiley Online Library
Compact, on‐chip spectrometers exploiting tailored disorder for broadband light scattering
enable high‐resolution signal analysis while maintaining a small device footprint. Due to …

Photonics of human saliva: potential optical methods for the screening of abnormal health conditions and infections

J Lukose, MN, AK Barik, KM Pai, VK Unnikrishnan… - Biophysical …, 2021 - Springer
Human saliva can be treated as a pool of biological markers able to reflect on the state of
personal health. Recent years have witnessed an increase in the use of optical devices for …

On-chip parallel Fourier transform spectrometer for broadband selective infrared spectral sensing

A Fathy, YM Sabry, S Nazeer, T Bourouina… - Microsystems & …, 2020 - nature.com
Optical spectrometers enable contactless chemical analysis. However, decreasing both their
size and cost appears to be a prerequisite to their widespread deployment. Chip-scale …

Compact gas cell integrated with a linear variable optical filter

NP Ayerden, G de Graaf, RF Wolffenbuttel - Optics Express, 2016 - opg.optica.org
A miniaturized methane (CH_4) sensor based on nondispersive infrared absorption is
realized in MEMS technology. A high level of functional integration is achieved by using the …

Strategies for high performance and scalable on-chip spectrometers

J Wang, B Zheng, X Wang - Journal of Physics: Photonics, 2020 - iopscience.iop.org
Miniature spectrometers provide promising potential for on-chip or in situ optical analysis. In
recent years there has been significant progress towards reducing the size and improving …

Pixelated gradient thickness optical filter for visible light spectroscopy

P Sahani, S Nabana, T Okatani, N Inomata… - Applied Optics, 2024 - opg.optica.org
A miniature low-cost pixelated gradient thickness optical filter is proposed to achieve
spectroscopy in the visible wavelength range. The optical filter consists of a two-dimensional …

Single-pixel MEMS spectrometer based on compressive sensing

G Zhou, Y Qi, ZH Lim, G Zhou - IEEE Photonics Technology …, 2020 - ieeexplore.ieee.org
This letter demonstrates a miniature spectrometer suitable for transmission spectroscopy. A
MEMS oscillating mask is designed to encode the light distribution dispersed along a slit. A …

Modeling and control of a large-stroke electrothermal MEMS mirror for Fourier transform microspectrometers

F Han, W Wang, X Zhang, H **e - Journal of …, 2016 - ieeexplore.ieee.org
A microelectromechanical systems (MEMS) mirror with large vertical displacement has been
developed for Fourier transform microspectrometers, but there exists a large tilting during the …

A miniaturized optical gas-composition sensor with integrated sample chamber

NP Ayerden, M Ghaderi, P Enoksson… - Sensors and Actuators B …, 2016 - Elsevier
A robust and highly miniaturized optical gas sensor based on optical absorption
spectroscopy is presented. By using the resonator cavity of a linear variable optical filter …