The majority of microelectromechanical system (MEMS) devices must be combined with
integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers …

This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-
electro-mechanical systems) fabrication technologies and enabled micro devices of various …

Piezoresistive sensors are among the earliest micromachined silicon devices. The need for
smaller, less expensive, higher performance sensors helped drive early micromachining …

Microfabrication processes for chemical and biochemical sensors are reviewed. Standard
processing steps originating from semiconductor technology are detailed, and specific …

A single-chip gas detection system fabricated in industrial CMOS technology combined with
post-CMOS micro-machining is presented. The sensors rely on a chemo-sensitive polymer …

Piezoresistive sensors are among the oldest and most widely used silicon microsystems. Yet
a book dedicated to their design is strangely lacking and most introductory MEMS textbooks …

This paper presents a novel resonant-microsensor platform for chemical and biological
sensing applications in gaseous and liquid environment. The disk-shape microstructure is …

Sensing systems-on-chip (SSoCs), combining micromachined sensing structures and
microelectronic building blocks on a single chip, are reviewed. While single-chip pressure …

This paper presents a novel type of resonant magnetic field sensor exploiting the Lorentz
force and providing a frequency output. The mechanical resonator, a cantilever structure, is …

The paper reviews the state-of-the-art in the field of CMOS-based microelectromechanical
systems (MEMS). The different CMOS MEMS fabrication approaches, pre-CMOS …