Boron x-ray window
J Sommer, J Abbott - US Patent 10,636,614, 2020 - Google Patents
An x-ray window can include a thin film that comprises boron. The thin film can be relatively
thin, such as for example≤ 200 nm. This x-ray window can be strong; can have high x-ray …
thin, such as for example≤ 200 nm. This x-ray window can be strong; can have high x-ray …
Semiconductor device including metal-2 dimensional material-semiconductor contact
LEE Minhyun, KIM Haeryong, S Hyeon**… - US Patent …, 2024 - Google Patents
US12040360B2 - Semiconductor device including metal-2 dimensional material-semiconductor
contact - Google Patents US12040360B2 - Semiconductor device including metal-2 …
contact - Google Patents US12040360B2 - Semiconductor device including metal-2 …
Boron x-ray window
J Sommer, J Abbott - US Patent 11,545,276, 2023 - Google Patents
An x-ray window can include a boron-film 12 and an aluminum-film 52 spanning an aperture
15 of a support-frame 11. The boron-film 12 and the aluminum-film 52 can be the only films …
15 of a support-frame 11. The boron-film 12 and the aluminum-film 52 can be the only films …
Semiconductor device including metal-2 dimensional material-semiconductor contact
LEE Minhyun, KIM Haeryong, S Hyeon**… - US Patent …, 2020 - Google Patents
US10790356B2 - Semiconductor device including metal-2 dimensional material-semiconductor
contact - Google Patents US10790356B2 - Semiconductor device including metal-2 …
contact - Google Patents US10790356B2 - Semiconductor device including metal-2 …
Boron x-ray window
J Sommer, J Abbott - US Patent 11,967,439, 2024 - Google Patents
An x-ray window can include a boron-film 12 and an aluminum-film 52 spanning an aperture
15 of a support-frame 11. The boron-film 12 and the aluminum-film 52 can be the only films …
15 of a support-frame 11. The boron-film 12 and the aluminum-film 52 can be the only films …
Pellicle and method of manufacturing same
PH Li, YT Lin, YY Lin, HT Yang - US Patent 11,526,073, 2022 - Google Patents
A pellicle comprises a stress-controlled metal layer. The stress in said metal layer may be
between about 500-50 MPa. A method of manufacturing a pellicle comprising a metal layer …
between about 500-50 MPa. A method of manufacturing a pellicle comprising a metal layer …
Method of manufacturing a membrane assembly
P Janssen, JHW Kuntzel - US Patent 12,001,135, 2024 - Google Patents
A method of manufacturing a membrane assembly for EUV lithography, wherein a layer
which forms at least part of a pellicle membrane is provided after one or more etching steps …
which forms at least part of a pellicle membrane is provided after one or more etching steps …
Method of manufacturing a membrane assembly
VAN Pieter-Jan, S Baltussen, D De Graaf… - US Patent …, 2024 - Google Patents
A method for manufacturing a membrane assembly for EUV lithography, the method
including: providing a stack including: at least one membrane layer supported by a planar …
including: providing a stack including: at least one membrane layer supported by a planar …
Boron X-ray window
J Sommer, J Abbott - US Patent 11,361,933, 2022 - Google Patents
An x-ray window can include a thin film that comprises boron. The thin film can be relatively
thin, such as for example≤ 200 nm. This x-ray window can be strong; can have high x-ray …
thin, such as for example≤ 200 nm. This x-ray window can be strong; can have high x-ray …
Pellicle and method of manufacturing same
PH Li, YT Lin, YY Lin, HT Yang - US Patent 11,340,525, 2022 - Google Patents
A pellicle comprises a stress-controlled metal layer. The stress in said metal layer may be
between about 500-50 MPa. A method of manufacturing a pellicle comprising a metal layer …
between about 500-50 MPa. A method of manufacturing a pellicle comprising a metal layer …