Hyperdo**-regulated room-temperature NO2 gas sensing performances of black silicon based on lateral photovoltaic effect
W Wang, H Li, X Liu, S Ma, Y Zhao, B Dong, Y Li… - Sensors and actuators B …, 2023 - Elsevier
Black silicon co-hyperdoped with sulfur and nitrogen in different ratios is prepared by
femtosecond laser-assisted chemical etching in the mixed atmosphere of SF 6 and NF 3 with …
femtosecond laser-assisted chemical etching in the mixed atmosphere of SF 6 and NF 3 with …
Perspectives on black silicon in semiconductor manufacturing: Experimental comparison of plasma etching, MACE, and Fs-laser etching
In semiconductor manufacturing, black silicon (bSi) has traditionally been considered as a
sign of unsuccessful etching. However, after more careful consideration, many of its …
sign of unsuccessful etching. However, after more careful consideration, many of its …
Tailoring Femtosecond‐Laser Processed Black Silicon for Reduced Carrier Recombination Combined with> 95% Above‐Bandgap Absorption
The femtosecond‐pulsed laser processed black silicon (fs‐bSi) features high absorptance in
a wide spectral range but suffers from high amount of laser induced damage as compared …
a wide spectral range but suffers from high amount of laser induced damage as compared …
[Free GPT-4]
The mid-infrared (IR)-sensitive n/p-junction was fabricated on a p-doped silicon (Si) wafer
via ultrashort laser n-type surface hyperdo** and high-temperature annealing. First, the n …
via ultrashort laser n-type surface hyperdo** and high-temperature annealing. First, the n …
[HTML][HTML] Synergic Effect of N and Se Facilitates Photoelectric Performance in Co-Hyperdoped Silicon
Femtosecond-laser-fabricated black silicon has been widely used in the fields of solar cells,
photodetectors, semiconductor devices, optical coatings, and quantum computing. However …
photodetectors, semiconductor devices, optical coatings, and quantum computing. However …
Electrical transport properties in Ge hyperdoped with Te
D Caudevilla, S Algaidy, F Pérez-Zenteno… - Semiconductor …, 2022 - iopscience.iop.org
In this work we have successfully hyperdoped germanium with tellurium with a concentration
peak of 10 21 cm− 3. The resulting hyperdoped layers show good crystallinity and sub …
peak of 10 21 cm− 3. The resulting hyperdoped layers show good crystallinity and sub …