Application of an Inverse-Hysteresis Iterative Control Algorithm for AFM Fabrication
S ASHLEY - 2010 - scholarscompass.vcu.edu
An iterative control algorithm (ICA) which uses an approximate inverse-hysteresis model is
implemented to compensate for hysteresis to precisely fabricate features on a soft polymer …
implemented to compensate for hysteresis to precisely fabricate features on a soft polymer …