Position controlling with less overshoot and control effort is a fundamental issue in the
design and application of micro-actuators such as micro-positioner. Also, tracking a …

In this article, a robust switching PID controller coupled to a feedforward compensator is
designed for set-point regulation of an electrostatic micro-actuator. The nonlinear model of …

In this paper, attention was given to position control and path tracking of cantilever
micro/nano-positioners subjected to Casimir force within and beyond the pull-in range. The …

This paper aims to develop an improved fuzzy controller for position controlling of nano-wire-
based electromechanical nano-tweezers. The nonlinear governing equation is developed …

A robust proportional integral derivative (PID) controller coupled to a feedforward
compensator is designed for set-point regulation manoeuvres of an electrostatic …

In this article the design of an intelligent robust controller for a micro-actuator is presented.
The μ-actuator is composed of a micro-capacitor, whose one plate is clamped while its other …

This paper presents the design of a robust model-based controller coupled to a feed-forward
compensator set-point regulation maneuvers of an electrostatic micro-mechanical actuator …

A current goal for microactuators is to extend their usually small working ranges, which
typically result from mechanical connections and restoring forces imposed by cantilevers. In …

Based on the super twisting concept, this article develops an integral sliding mode controller
with nonlinear disturbance observer for position control and extending the traveling range of …

In this article the modeling aspects of an electrostatic microactuator (µ-A) with squeezed thin
film dam** effects are presented. The µ-A is composed of a microcapacitor whose one …