The article provides a review of the current state of affairs in the field of physics and
technology of multilayer beryllium-containing mirrors intended for projection lithography and …

The advent of nanoscale multilayer (ML) technology has led to great breakthroughs in many
scientific and technological fields such as nano-manufacturing, bio-imaging, atto-physics …

We provide an analysis of contemporary multilayer optics for extreme ultraviolet (EUV) solar
astronomy in the wavelength ranges: λ= 12.9–13.3 nm, λ= 17–21 nm, λ= 28–33 nm, and λ …

It is shown that in the vicinity of 17 nm wavelength, Be can be used as an optically
contrasting material with Al in periodic multilayer mirrors. At the same time, due to the low …

A real opportunity for applying traditional optical methods to soft X-ray and extreme UV
(ultraviolet) radiation bands has appeared thanks to recent successes in the area of …

The present work investigates continuous spray fluidized bed agglomeration with internal
separation using glass primary particles and sprayed solution of cellulosic binder. Different …

We present a way to analyze the chemical composition of periodical multilayer structures
using the simultaneous analysis of grazing incidence hard X-Ray reflectivity (GIXR) and …

In this work we present results of an new experiment related to low energy protons
bombardments on nano-structured optical coatings. Multilayer structures protected by …

Pd/Y multilayer mirrors operating in the soft X-ray region are characterized by a high
theoretical reflectance, reaching 65% at normal incidence in the 8-12 nm wavelength range …

This paper presents the first results of systematic studies of beryllium as a material for
multilayer mirrors (MLM) and transmission filters (TF) for the EUV spectral range. The …