With ongoing economic, scientific, and technological developments, the electronic devices
used in daily lives are develo** toward precision and miniaturization, and so the demand …

Flexure-based micropositioning systems with a large workspace are attractive for a variety of
precision engineering applications. In this paper, a new idea of multistage compound …

Macro–micro dual-drive technology uses a micro-drive system to compensate for motion
errors of a macro-drive system, solving the contradiction between large travel and high …

The existing Bouc–Wen models for piezoelectric ceramic actuators (PCAs) possess the
symmetrical characteristic of the hysteretic component and can be categorized as …

By serially combining two piezoelectrically actuated compliant stages, a dual-stage fast tool
servo (FTS) is developed to greatly enhance the trajectory tracking performance of …

Piezoelectric actuators (PAs) are widely used in precision positioning control and active
vibration control. However, positioning accuracy can be compromised by the hysteresis of …

Dual-servo systems (DSSs) are highly desirable in micro-/nanomanipulation when high
positioning accuracy, long stroke motion, and high servo bandwidth are required …

This paper presents the design, analysis, and control of a novel compact, large range 1-DOF
micro manipulation mechanism. Leaf flexures were incorporated into a modular multilayer …

This paper presents a 2-degrees of freedom flexure-based micropositioning stage with a
flexible decoupling mechanism. The stage is composed of an upper planar stage and four …

This paper presents the design, modeling, analysis, testing and control of a novel compact
long-stroke precision positioning stage. The stage is devised with leaf flexures to achieve a …