Transition metal silicides in silicon technology

AH Reader, AH Van Ommen, PJW Weijs… - Reports on Progress …, 1993 - iopscience.iop.org
Studies of the properties and characteristics of transition metal silicides have been
stimulated by their (potential) use in integrated circuit technology. This review describes …

Schottky contacts on silicon

JH Werner, U Rau - Silicon-Based Millimeter-Wave Devices, 1994 - Springer
Experiments on rectifying contacts started in 1874 with the pioneering work of Braun who
observed asymmetries in transport of electrical current across metal/semiconductor …

X‐ray‐diffraction study of quasipseudomorphic ErSi1.7 layers formed by channeled ion‐beam synthesis

MF Wu, A Vantomme, H Pattyn, G Langouche… - Journal of applied …, 1996 - pubs.aip.org
ErSi1. 7 layers with high crystalline quality (χmin of Er is 1.5%) have been formed by 90 keV
Er ion implantation to a dose of 1.6× 1017/cm2 at 450° C using channeled implantation. The …

Amorphous alloy formation and thickness dependent growth of Gd–silicides in solid phase thin film reaction

GL Molnár, G Peto, E Zsoldos, NQ Khánh, ZE Horváth - Thin Solid Films, 1998 - Elsevier
The formation of amorphous and equilibrium phases was investigated during the solid-
phase reaction of Gd thin film with (111) and (100) oriented Si substrate as a function of …

Epitaxial samarium disilicide films on silicon (0 0 1) substrates: growth, structural and electrical properties

F Natali, NOV Plank, J Stephen, M Azeem… - Journal of Physics D …, 2011 - iopscience.iop.org
In this paper the effect of the growth temperature on the structural and electrical properties of
samarium silicide films is investigated. The growth of the epitaxial films is performed under …

Crystalline quality and phase stability of hexagonal GdSi1. 7 layers formed by channeled ion‐beam synthesis

MF Wu, A Vantomme, H Pattyn, G Langouche… - Applied physics …, 1996 - pubs.aip.org
Previous reports show that, among all rare-earth silicides, GdSi1. 7 is the most difficult one to
grow epitaxially with a good crystalline quality on a Si substrate. However, this letter shows …

Effect of crystallization on the electrical and interface characteristics of GdSi2/p-Si Schottky junctions

ZJ Horváth, G Molnár, B Kovács, G Petö… - Journal of crystal …, 1993 - Elsevier
The electrical and interface parameters of epitaxial orthorhombic, textured orthorhombic,
polycrystalline orthorhombic, and polycrystalline hexagonal GdSi 2/(100) p-Si Schottky …

Selective nucleation and growth of carbon nanotubes at the interface

LP Biró, G Molnár, I Szabó, Z Vértesy… - Applied Physics …, 2000 - pubs.aip.org
A patterned CoSi2/Si substrate was used for the catalytic growth of carbon nanostructures
and nanotubes in the temperature range of 750–800 C, using acetylene/N2 as a reaction …

On the formation and structural properties of hexagonal rare earth (Y, Gd, Dy, Er and Yb) disilicide thin films

FA Geenen, W Knaepen, J Demeulemeester… - Journal of alloys and …, 2014 - Elsevier
A systematic study was performed of the solid state reaction between a 100 nm thick layer of
a rare earth metal and a Si substrate. The solid state reaction of five different rare earth …

Channeled ion beam synthesis: a new technique for forming high-quality rare-earth silicides

A Vantomme, MF Wu, U Wahl, J De Wachter… - Nuclear Instruments and …, 1996 - Elsevier
High dose 166Er or 160Gd implantations are used to form rare-earth (RE) silicides in Si.
After implanting 0.8− 2.0× 1017 at./cm2 with 90 keV into Si (111) substrates kept at∼ 450 to …