Additive manufacturing of metal structures at the micrometer scale

L Hirt, A Reiser, R Spolenak, T Zambelli - Advanced Materials, 2017 - Wiley Online Library
Currently, the focus of additive manufacturing (AM) is shifting from simple prototy** to
actual production. One driving factor of this process is the ability of AM to build geometries …

Precursors for direct-write nanofabrication with electrons

S Barth, M Huth, F Jungwirth - Journal of Materials Chemistry C, 2020 - pubs.rsc.org
Focused electron beam-induced deposition (FEBID) is a maskless, direct-write
nanolithography approach for the growth of nanostructures. In recent years, significant …

Gas-assisted focused electron beam and ion beam processing and fabrication

I Utke, P Hoffmann, J Melngailis - … of Vacuum Science & Technology B …, 2008 - pubs.aip.org
Beams of electrons and ions are now fairly routinely focused to dimensions in the nanometer
range. Since the beams can be used to locally alter material at the point where they are …

[HTML][HTML] Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical …

I Utke, P Swiderek, K Höflich, K Madajska… - Coordination Chemistry …, 2022 - Elsevier
Nanostructured materials made from group 10 (Ni, Pd, Pt) and group 11 (Cu, Ag, Au)
elements have outstanding technological relevance in microelectronics, nano-optics …

Review of magnetic nanostructures grown by focused electron beam induced deposition (FEBID)

JM De Teresa, A Fernández-Pacheco… - Journal of Physics D …, 2016 - iopscience.iop.org
We review the current status of the use of focused electron beam induced deposition
(FEBID) for the growth of magnetic nanostructures. This technique relies on the local …

Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective

A Botman, JJL Mulders, CW Hagen - Nanotechnology, 2009 - iopscience.iop.org
The creation of functional nanostructures by electron-beam-induced deposition (EBID) is
becoming more widespread. The benefits of the technology include fast'point-and …

Electron beam deposition for nanofabrication: Insights from surface science

JD Wnuk, SG Rosenberg, JM Gorham, WF Van Dorp… - Surface Science, 2011 - Elsevier
Electron beam induced deposition (EBID) is a direct-write lithographic technique that utilizes
the dissociation of volatile precursors by a focused electron beam in a low vacuum …

Focused-electron-beam engineering of 3D magnetic nanowires

C Magén, J Pablo-Navarro, JM De Teresa - Nanomaterials, 2021 - mdpi.com
Focused-electron-beam-induced deposition (FEBID) is the ultimate additive nanofabrication
technique for the growth of 3D nanostructures. In the field of nanomagnetism and its …

Tuning shape, composition and magnetization of 3D cobalt nanowires grown by focused electron beam induced deposition (FEBID)

J Pablo-Navarro, D Sanz-Hernández… - Journal of Physics D …, 2017 - iopscience.iop.org
Electron beam induced deposition of 3D cobalt nanowires with simultaneous high metallic
content (≈ 80% at.) and small diameter (< 100 nm) has been achieved by optimization of …

Nanoscale, surface-confined phase separation by electron beam induced oxidation

S Barth, F Porrati, D Knez, F Jungwirth, NP Jochmann… - Nanoscale, 2024 - pubs.rsc.org
Electron-assisted oxidation of Co–Si-based focused electron beam induced deposition
(FEBID) materials is shown to form a 2–4 nm metal oxide surface layer on top of an …