Thin film piezoelectric materials offer a number of advantages in microelectromechanical
systems (MEMS), due to the large motions that can be generated, often with low hysteresis …

Flexoelectricity, as a fundamental electromechanical coupling effect between electric
polarization and mechanical strain gradient, or vice versa between electric polarization …

We present a computational study of spontaneous polarization and piezoelectricity in Sc x Al
1− x N alloys in the compositional range from x= 0 to x= 0.5, obtained in the context of …

There has been a resurgence of complex oxides of late owing to their ferroelectric and
ferromagnetic properties. Although these properties had been recognized decades ago, the …

This paper provides a detailed overview of developments in transducer materials technology
relating to their current and future applications in micro-scale devices. Recent advances in …

Piezoelectric materials play a crucial role in a large number of devices and applications
modern society would not like to miss. Mobile phones and ultrasonic imaging are just the …

This paper reviews deposition, integration, and device fabrication of PbZr/sub x/Ti/sub 1-
x/O/sub 3/(PZT) films for applications in micro-electromechanical systems. An ultrasonic …

This paper describes fabrication arid characterization results of piezoelectric micromachined
ultrasonic transducers (pMUTs) based on 2-/spl mu/m-thick Pb (Zr/sub 0.53/Ti/sub …

Transverse piezoelectric properties of Pb (Zr, Ti) O3 (PZT) films were estimated using a
simple measuring method we developed. The c-axis oriented PZT films were epitaxially …

In recent years, piezoelectric microelectromechanical systems (MEMS) have attracted
attention as next-generation functional microdevices. Typical applications of piezoelectric …