The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs)
is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve …

Emerging applications in quantum information, microscopy, biosensing, depth sensing, and
augmented reality demand miniaturized components in the visible (VIS) and near-infrared …

A new class of hybrid systems that couple optical, electrical and mechanical degrees of
freedom in nanoscale devices is under development in laboratories worldwide. These nano …

Programmable photonic integrated circuits offer exciting opportunities for optoelectronic
signal processing, computing and communications in a number of emerging applications in …

Programmable photonic integrated circuits are emerging as an attractive platform for
applications such as quantum information processing and artificial neural networks …

With the development of silicon photonics, dense photonic integrated circuits play a
significant role in applications such as light detection and ranging systems, photonic …

We present an on-chip optoectromechanical phase shifter with low insertion loss and low
half-wave voltage using a silicon nitride platform. The device is based on a slot waveguide …

This work describes a novel micromechanical structure capable of producing out-of-plane
motion from in-plane forces generated by electrostatic microelectromechanical system …

We present a design for an analog phase shifter based on Silicon Photonic MEMS
technology. The operation principle is based on a two-step parallel plate electrostatic …

Photonic integrated circuits (PICs) have enabled novel functionality in quantum optics,
quantum information processing and quantum communication. PICs based on Silicon …