There is an indispensable need for fluid flow rate and direction sensors in various medical,
industrial and environmental applications. Besides the critical demands on sensing range of …

Purpose Pressure, being one of the key variables investigated in scientific and engineering
research, requires critical and accurate measurement techniques. With the advancements in …

Hydraulic technology with smaller sizes and higher reliability trends, including fault
prediction and intelligent control, requires high-performance temperature and pressure …

Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones
have gained significant attention due to their miniaturization, high performance, and diverse …

This article presents a complementary metal-oxide semiconductor (CMOS)-
microelectromechanical system (MEMS) monolithic integrated thermal flow sensor system …

Leveraging More-than-Moore technology, we demonstrate an integrated CMOS MEMS flow
sensor via a very compact system on chip (SoC) that can sense the bidirectional N2 gas …

This paper presents a piezoresistive differential pressure sensor based on a silicon-on-
insulator (SOI) structure for low pressure detection from 0 to 30 kPa. In the design phase, the …

With the development of the micro electromechanical system (MEMS), which widely adopts
micro differential pressure sensors (MDPSs), the demand for high-performance MDPSs had …

Flexible flow sensors show potential applications in aerospace, wearable devices,
biomedicine, and other fields. In this article, a flexible microelectromechanical system …

Featured Application The thermoelectric microgenerators converted waste heat to electrical
power and thus have a potential for application in electronic devices and microsensors …