The emerging demand for device miniaturization and integration prompts the patterning
technique of micronano-cross-scale structures as an urgent desire. Lithography, as a …

Maskless photolithography based on digital micromirror devices (DMDs) is considered the
next-generation low-cost lithographic technology. However, DMD-based digital …

Pixelated color converters are envisioned to achieve full-color high-resolution display
through down conversion of blue/ultraviolet (UV) micro-LEDs. Quantum dots (QDs) are …

Microlens arrays, as typical micro-optical elements, effectively enhance the integration and
performance of optical systems. The surface shape errors and surface roughness of …

Cell aggregates as a 3D culture model can effectively mimic the physiological processes
such as embryonic development, immune response, and tissue renewal in vivo. Researches …

In digital micromirror device (DMD)-based projection photolithography, the throughput
largely depends on the effectiveness of the laser energy utilization, which is directly …

Digital micromirror device (DMD)-based maskless projection lithography has gained
significant attention for its maskless, flexible, and cost-effective characteristics. However …

Projection photolithography using an extreme-ultraviolet light source is the core technology
that has enabled patterning on the scale of a few nanometers that is required for modern …

Maskless lithography technologies have been developed and played an important role in
the fabrication of functional micronano devices for microelectronics, biochips and photonics …

摘要光刻技术在前沿科学与国计民生等领域发挥着重要作用. 随着曝光光源,
数字微镜器件(DMD), 投影镜头等光学元件的升级及计算机控制技术的飞速发展, 基于DMD …