Atomic layer deposition (ALD) of palladium: From processes to applications

C Lausecker, D Muñoz-Rojas… - Critical Reviews in Solid …, 2024 - Taylor & Francis
Atomic layer deposition (ALD) has been successfully used for the deposition of palladium
(Pd) thin films and nanostructures, with a wide range of applications in fields such as …

Atomic-scale engineering of advanced catalytic and energy materials via atomic layer deposition for eco-friendly vehicles

X Liu, Y Su, R Chen - International Journal of Extreme …, 2023 - iopscience.iop.org
Zero-emission eco-friendly vehicles with partly or fully electric powertrains have exhibited
rapidly increased demand for reducing the emissions of air pollutants and improving the …

[HTML][HTML] Computational fluid dynamics study of the atomic layer deposition process around cylindrical and planar configurations

GE Isitman, D Izbassarov, RL Puurunen… - Chemical Engineering …, 2023 - Elsevier
Computational fluid dynamics (CFD) simulations were used to model atomic layer
deposition (ALD) coating processes in the continuum flow regime. CFD model was validated …

Modeling scale-up of particle coating by atomic layer deposition

A Yanguas-Gil, JW Elam - Journal of Vacuum Science & Technology A, 2025 - pubs.aip.org
Atomic layer deposition (ALD) is a promising technique to functionalize particle surfaces for
energy applications including energy storage, catalysis, and decarbonization. In this work …