Atmospheric pressure plasma (APP) deposition techniques are useful today because of their
simplicity and their time and cost savings, particularly for growth of oxide films. Among the …

The inclusion of plasma in atomic layer deposition processes generally offers the benefit of
substantially reduced growth temperatures and greater flexibility in tailoring the gas-phase …

This work presents a global plasma model of a gridded air-breathing electric propulsion
concept based on magnetized high-frequency plasma operating in the pressure range of …

Room-temperature plasma-enhanced atomic layer deposition (PEALD) of ZnO was studied
by depositing the films using diethylzinc and O 2 plasma from inductively-coupled plasma …

The effect of oxygen admixture in an argon capacitively coupled radio-frequency plasma is
investigated experimentally and computationally in a symmetrical discharge cell, at …

Plasma-enhanced atomic layer deposition has gained a lot of attraction over the past few
years. A myriad of processes have been reported, several reviews have been written on this …

This study investigated the characteristics of radiofrequency, middle-pressure argon plasma
used in the atomic layer deposition (ALD) of Al2O3 films. Based on the electrical …

We report the deposition of nanocrystalline graph-itic films on Cu foil in a roll-to-roll (R2R)
plasma-enhanced chemical vapor deposition (PECVD) system. The influence of discharge …

In atmospheric pressure RF discharges, positive and negative feedback regions are defined
based on the influence of varying the capacitance of the series capacitor in an inverted L …

The main purpose of this thesis is to develop an efficient and scalable technique for
depositing graphene on various flexible substrates. Hence, a custom-built roll-to-roll …