A review of cost-effective black silicon fabrication techniques and applications
Ever since the discovery of black silicon, scientists around the world have been trying to
come up with novel, cost-effective methods of utilizing this super material in a variety of …
come up with novel, cost-effective methods of utilizing this super material in a variety of …
Ascendant bioinspired antireflective materials: Opportunities and challenges coexist
In the past decades, antireflective (AR) materials have drawn more and more attention
owing to its promising and wide applications such as photovoltaic industry, optical devices …
owing to its promising and wide applications such as photovoltaic industry, optical devices …
Three-dimensional femtosecond laser nanolithography of crystals
So far, nanostructuring of hard optical crystals has been exclusively limited to their surface,
as stress-induced crack formation and propagation render high-precision volume processes …
as stress-induced crack formation and propagation render high-precision volume processes …
Gigahertz speed operation of epsilon-near-zero silicon photonic modulators
Optical communication systems increasingly require electro-optical modulators that deliver
high modulation speeds across a large optical bandwidth with a small device footprint and a …
high modulation speeds across a large optical bandwidth with a small device footprint and a …
High-efficiency all-dielectric Huygens metasurfaces from the ultraviolet to the infrared
Conventional optics depend on the gradual accumulation of spatially dependent phase
shifts imparted on light propagating through a medium to modify the wavefront of an incident …
shifts imparted on light propagating through a medium to modify the wavefront of an incident …
Unidirectional lasing from template-stripped two-dimensional plasmonic crystals
Plasmon lasers support cavity structures with sizes below that of the diffraction limit.
However, most plasmon-based lasers show bidirectional lasing emission or emission with …
However, most plasmon-based lasers show bidirectional lasing emission or emission with …
Polarization-dependent lasing behavior from low-symmetry nanocavity arrays
This paper reports how geometric effects in low-symmetry plasmonic nanoparticle arrays
can produce polarization-dependent lasing responses. We developed a scalable fabrication …
can produce polarization-dependent lasing responses. We developed a scalable fabrication …
Tuning the performance of negative tone electron beam resists for the next generation lithography
SM Lewis, GA DeRose, HR Alty… - Advanced Functional …, 2022 - Wiley Online Library
A new class of electron bean negative tone resist materials has been developed based on
heterometallic rings. The initial resist performance demonstrates a resolution of 15 nm half …
heterometallic rings. The initial resist performance demonstrates a resolution of 15 nm half …
One-dimensional Si/Ge nanowires and their heterostructures for multifunctional applications—a review
Remarkable progress has been made in the field of one-dimensional semiconductor
nanostructures for electronic and photonic devices. Group-IV semiconductors and their …
nanostructures for electronic and photonic devices. Group-IV semiconductors and their …
[HTML][HTML] DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process
The quest to sculpture materials as small and deep as possible is an ongoing topic in micro-
and nanofabrication. For this, the Bosch process has been widely used to achieve …
and nanofabrication. For this, the Bosch process has been widely used to achieve …