A review of cost-effective black silicon fabrication techniques and applications

J Soueiti, R Sarieddine, H Kadiri, A Alhussein… - Nanoscale, 2023 - pubs.rsc.org
Ever since the discovery of black silicon, scientists around the world have been trying to
come up with novel, cost-effective methods of utilizing this super material in a variety of …

Ascendant bioinspired antireflective materials: Opportunities and challenges coexist

Z Han, Z Jiao, S Niu, L Ren - Progress in Materials Science, 2019 - Elsevier
In the past decades, antireflective (AR) materials have drawn more and more attention
owing to its promising and wide applications such as photovoltaic industry, optical devices …

Three-dimensional femtosecond laser nanolithography of crystals

A Ródenas, M Gu, G Corrielli, P Paiè, S John, AK Kar… - Nature …, 2019 - nature.com
So far, nanostructuring of hard optical crystals has been exclusively limited to their surface,
as stress-induced crack formation and propagation render high-precision volume processes …

Gigahertz speed operation of epsilon-near-zero silicon photonic modulators

MG Wood, S Campione, S Parameswaran, TS Luk… - Optica, 2018 - opg.optica.org
Optical communication systems increasingly require electro-optical modulators that deliver
high modulation speeds across a large optical bandwidth with a small device footprint and a …

High-efficiency all-dielectric Huygens metasurfaces from the ultraviolet to the infrared

AJ Ollanik, JA Smith, MJ Belue, MD Escarra - ACS photonics, 2018 - ACS Publications
Conventional optics depend on the gradual accumulation of spatially dependent phase
shifts imparted on light propagating through a medium to modify the wavefront of an incident …

Unidirectional lasing from template-stripped two-dimensional plasmonic crystals

A Yang, Z Li, MP Knudson, AJ Hryn, W Wang, K Aydin… - ACS …, 2015 - ACS Publications
Plasmon lasers support cavity structures with sizes below that of the diffraction limit.
However, most plasmon-based lasers show bidirectional lasing emission or emission with …

Polarization-dependent lasing behavior from low-symmetry nanocavity arrays

MP Knudson, R Li, D Wang, W Wang, RD Schaller… - ACS …, 2019 - ACS Publications
This paper reports how geometric effects in low-symmetry plasmonic nanoparticle arrays
can produce polarization-dependent lasing responses. We developed a scalable fabrication …

Tuning the performance of negative tone electron beam resists for the next generation lithography

SM Lewis, GA DeRose, HR Alty… - Advanced Functional …, 2022 - Wiley Online Library
A new class of electron bean negative tone resist materials has been developed based on
heterometallic rings. The initial resist performance demonstrates a resolution of 15 nm half …

One-dimensional Si/Ge nanowires and their heterostructures for multifunctional applications—a review

SK Ray, AK Katiyar, AK Raychaudhuri - Nanotechnology, 2017 - iopscience.iop.org
Remarkable progress has been made in the field of one-dimensional semiconductor
nanostructures for electronic and photonic devices. Group-IV semiconductors and their …

[HTML][HTML] DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process

B Chang, P Leussink, F Jensen, J Hübner… - Microelectronic …, 2018 - Elsevier
The quest to sculpture materials as small and deep as possible is an ongoing topic in micro-
and nanofabrication. For this, the Bosch process has been widely used to achieve …